Optical Semiconductor Bonding for Precise Waveguide Alignment

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Solution Overview

Problem

Existing optical semiconductor devices face challenges in achieving high accuracy during mounting due to potential misalignment caused by heating processes, which can lower the efficiency of optical coupling.

Innovation Solution

The optical semiconductor device employs a hydrophilic bonding method between the first and second semiconductor elements, eliminating the need for post-alignment heating. This method involves making the bonding surfaces hydrophilic, temporarily bonding them at room temperature, and then main bonding at a higher temperature, ensuring precise alignment and strong bonding without misalignment issues.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If soldering or conventional bonding methods are used to mount semiconductor elements, then strong bonding is achieved, but misalignment occurs due to heating processes which lowers optical coupling efficiency

Engineering Contradiction:
Improvebonding strengthVSAvoidalignment accuracy
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The bonding surfaces are pre-treated with a hydrophilic treatment before bonding to enable strong adhesion without requiring subsequent heating processes. This preliminary preparation allows the elements to be firmly bonded while maintaining their aligned positions, preventing misalignment that would otherwise occur during heating-based bonding or soldering operations.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The surface properties of the bonding interfaces are changed by applying a hydrophilic treatment, which modifies the chemical characteristics of the surfaces. This parameter change enables strong bonding through hydrophilic adhesion mechanisms rather than thermal processes, thereby achieving both strong bonding strength and high alignment accuracy for optimal optical coupling.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If heating processes are applied for bonding or soldering, then strong bonding is achieved, but misalignment occurs which lowers optical coupling efficiency

Engineering Contradiction:
Improvebonding reliabilityVSAvoidalignment accuracy
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The thermal bonding process is replaced with a hydrophilic bonding mechanism. Instead of relying on heat-activated soldering or thermal bonding processes that cause expansion and misalignment, the invention uses chemically-active hydrophilic surfaces to achieve reliable bonding at lower temperatures, thereby maintaining alignment accuracy while ensuring bonding reliability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The bonding process parameters are changed from thermal activation to hydrophilic chemical activation. By treating the bonding surfaces to create hydrophilic properties and controlling the bonding environment, reliable bonding is achieved without the thermal expansion and misalignment problems associated with conventional heating processes.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If conventional bonding methods are used, then bonding is achieved, but optical coupling efficiency is reduced due to misalignment

Engineering Contradiction:
Improvebonding process simplicityVSAvoidalignment accuracy
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The bonding surfaces undergo preliminary hydrophilic treatment that simplifies the bonding process by enabling direct adhesion without complex heating or alignment correction steps. This pre-preparation ensures that elements bond reliably in their aligned positions, maintaining optical coupling efficiency while keeping the manufacturing process straightforward.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The surface chemical parameters are modified through hydrophilic treatment, which simplifies the bonding operation by allowing direct bonding without requiring precise thermal control or post-bonding alignment adjustments. This parameter change maintains both ease of manufacture and high alignment accuracy.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for highly accurate mounting of the semiconductor elements with suppressed misalignment, thereby maintaining high efficiency of optical coupling and ensuring reliable bonding between the elements.

Implementation Method 1

The first bonding surface and the second bonding surface are bonded to each other in a hydrophilic manner

Methodology Applied
Scientific EffectHydrophilic bonding: Hydrophile

Data Source

PatentUS20250201735A1Optical semiconductor device and method for manufacturing optical semiconductor device
Publication Date: 2025.06.19 SUMITOMO ELECTRIC INDUSTRIES LTD
  • US20250201735A1 patent drawing
  • US20250201735A1 patent drawing
  • US20250201735A1 patent drawing

AI summary

An optical semiconductor device according to an embodiment includes: a first semiconductor element having a first bonding surface and an end surface which crosses the first bonding surface and from which an optical signal is emitted; and a second semiconductor element having a second bonding surface facing the first bonding surface and an optical waveguide which extends in a direction parallel to the second bonding surface and through which the optical signal is transmitted. The first bonding surface and the second bonding surface are bonded to each other in a hydrophilic manner, and the end surface of the first semiconductor element and the optical waveguide of the second semiconductor element are optically coupled to each other.