Optical Cavity Mirror Fabrication Using Multi-Shot Quantum Cascade Lasers

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Solution Overview

Problem

The fabrication of mirrors for microscopic optical cavities requires high accuracy in material removal, with demands for stability and reproducibility that are challenging to meet with existing technologies.

Innovation Solution

A method combining the use of a quantum cascade laser (QCL) with a multi-shot sequence for material removal from an optical substrate, such as an optical fiber, to generate a concave surface profile with high precision.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a single CO2 laser pulse train is used for material removal, then the fabrication process is simple, but the surface accuracy and roughness control are insufficient

Engineering Contradiction:
Improvesurface accuracyVSAvoidfabrication system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The fabrication process is divided into multiple sequential laser shots instead of using a single pulse train. Each shot removes material layer by layer with controlled depth, allowing progressive refinement of the surface profile. This segmentation enables achieving nanometer-level accuracy (surface roughness < 0.1 nm) by cumulative precision control across multiple shots.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The method employs periodic laser shots with controlled intervals between pulses. The periodic application of laser energy allows the material to be removed in controlled cycles, with each cycle contributing to the final surface precision. This periodic action enables thermal management and precise control over material removal rate and surface quality.

Inventive Principle:
Principle #19Periodic action

2Manufacturing precision

If multiple laser shots are applied sequentially, then the material removal accuracy improves, but the fabrication time increases

Engineering Contradiction:
Improvematerial removal accuracyVSAvoidfabrication speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The multiple laser shots are applied in a continuous sequential manner without interrupting the fabrication process. Each shot immediately follows the previous one, maintaining continuous material removal action. This continuity ensures that the accumulated precision from multiple shots is achieved without idle time, balancing accuracy improvement with reasonable fabrication speed.

Inventive Principle:
Principle #20Continuity of useful action

3Productivity

If high laser power is used for rapid material removal, then the productivity increases, but the surface roughness deteriorates

Engineering Contradiction:
Improvematerial removal rateVSAvoidsurface roughness
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

Instead of using excessive high power that would damage the surface, the method applies partial action with multiple lower-power shots. Each shot removes a portion of the required material depth, and the cumulative effect of multiple partial removals achieves the total material removal goal while maintaining surface integrity. This partial action approach prevents surface roughness deterioration that would occur with single high-power shots.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach achieves a surface roughness of 0.1 nm and overall accuracy in the order of nanometers, enabling the creation of complex and precise mirror geometries for microscopic optical cavities.

Implementation Method 1

a first material portion of the optical substrate, in particular of the fiber core, is removed due to laser ablation by applying the sequence of multiple laser shots

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

a second material portion of the optical substrate, in particular of the fiber core, is melted, in particular melted and not removed, by applying the sequence of multiple laser shots

Methodology Applied
Scientific EffectOptical heating: Heating

Data Source

PatentEP4495644A1Fabrication of a mirror for an optical cavity
Publication Date: 2025.01.22 QLIBRI GMBH
  • EP4495644A1 patent drawingFigure 1~2
  • EP4495644A1 patent drawingFigure 3~4
  • EP4495644A1 patent drawingFigure 5~8

AI summary

For at least partial fabrication of a mirror for an optical cavity (16), a surface (13) to be processed of an optical substrate (1) is positioned in an operating plane (35), which is equal to or parallel to a focal plane of a laser arrangement (2), and a concave surface profile (14, 33) of the surface (13) is generated by applying a sequence of multiple laser shots to the surface (13) by using a quantum cascade laser (6) of the laser arrangement (2).