Optical Cavity Mirror Shaping With Multi-Shot Quantum Cascade Laser

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Solution Overview

Problem

The fabrication of mirrors for microscopic optical cavities requires high accuracy in material removal, with demands for stability and reproducibility that are challenging to meet with existing technologies.

Innovation Solution

A method and fabrication arrangement that utilize a quantum cascade laser (QCL) with a multi-shot sequence to remove material from an optical substrate, such as an optical fiber, to generate a concave surface profile with high precision.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a single CO2 laser pulse train is used to remove material, then material removal efficiency is improved, but manufacturing precision deteriorates due to inability to achieve high accuracy of a few nanometers

Engineering Contradiction:
Improvematerial removal efficiencyVSAvoidsurface profile accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The fabrication process is divided into multiple sequential laser shots instead of using a single pulse train. Each shot removes a portion of material, and the cumulative effect of multiple shots achieves the desired precision of a few nanometers while maintaining efficient material removal.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The laser is applied in periodic pulses with controlled intervals, allowing the material to respond to each pulse in a predictable manner. This periodic application enables precise control over the material removal process, achieving both efficiency and high manufacturing precision.

Inventive Principle:
Principle #19Periodic action

2Productivity

If high power laser is used to remove material quickly, then productivity is improved, but manufacturing precision deteriorates due to thermal effects and material damage

Engineering Contradiction:
Improvefabrication speedVSAvoidsurface quality
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The laser power is applied in periodic pulses rather than continuous high power, allowing thermal diffusion to occur between pulses. This prevents excessive heat accumulation and thermal damage to the material, maintaining surface quality while still achieving efficient material removal through cumulative effect.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

Multiple preliminary laser shots are applied before the final shaping shots. These preliminary shots remove the bulk material efficiently, while the final shots with lower power or different parameters refine the surface to achieve the required precision and quality.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If the laser beam is focused to a small spot for precision, then manufacturing precision is improved, but the area of material removal is limited, reducing productivity

Engineering Contradiction:
Improvesurface profile controlVSAvoidmaterial removal rate
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The material removal process is segmented into multiple passes with the focused laser beam. Different regions of the surface are treated in sequence, with the beam positioned at different locations for each shot. This allows the use of a small focused spot for precision while still processing larger areas through multiple sequential operations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The fabrication process extends into the temporal dimension by using multiple shots over time, rather than attempting to remove all material in a single pass. This multi-temporal approach allows a small focused beam to achieve both precision and productivity by accumulating material removal across many sequential operations.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Manufacturing precision

If multiple laser shots are applied to achieve high precision, then manufacturing precision is improved, but the time required increases, reducing productivity

Engineering Contradiction:
Improvesurface roughnessVSAvoidfabrication time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The laser shots are applied periodically with optimized intervals that allow efficient material removal while achieving the desired precision. The periodic timing is tuned so that each shot contributes maximally to the final surface quality without unnecessary delays, balancing precision requirements with fabrication time.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The number of laser shots is optimized to provide just enough material removal to achieve the desired precision, avoiding excessive shots that would waste time. The process uses the minimum necessary number of shots to reach the target surface roughness of 0.1 nm, eliminating redundant operations.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Achieves a surface roughness of 0.1 nm and overall accuracy of nanometer dimensions, allowing for complex and flexible mirror geometries, including freeform surfaces, while improving stability and reproducibility.

Implementation Method 1

A first material portion of the optical substrate, for example of the optical fiber, in particular of the fiber core, is removed due to laser ablation by applying the sequence of multiple laser shots

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

a second material portion of the optical substrate, for example of the optical fiber, in particular of the fiber core, is melted, in particular melted and not removed, by applying the sequence of multiple laser shots

Methodology Applied
Scientific EffectMelting: Melting

Data Source

PatentUS20250026093A1Fabrication of a mirror for an optical cavity
Publication Date: 2025.01.23 QLIBRI GMBH
  • US20250026093A1 patent drawing
  • US20250026093A1 patent drawing
  • US20250026093A1 patent drawing

AI summary

For at least partial fabrication of a mirror for an optical cavity, a surface to be processed of an optical substrate is positioned in an operating plane, which is equal to or parallel to a focal plane of a laser arrangement, and a concave surface profile of the surface is generated by applying a sequence of multiple laser shots to the surface by using a quantum cascade laser of the laser arrangement.