Optical Compensation System for Excimer Laser Annealing
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Solution Overview
Problem
The instability of the light beam emitted by excimer laser annealing devices, particularly the polysilicon layer in organic electroluminescent elements, due to the complexity and asymmetry of the excimer laser annealing process, affects the flatness and grain uniformity of crystallized polysilicon films.
Innovation Solution
An optical compensation system for the laser beam, comprising a laser source, a beam splitter, and a reversion assembly, which divides the laser beam into two beams with different paths, where the second beam is reversed and reflected to exit together with the first beam, compensating for asymmetry and improving stability, using reflective mirrors and a homogenizing lens to form a linear light beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If excimer laser annealing process is used to fabricate polysilicon layer, then polysilicon layer can be formed in organic electroluminescent elements, but the light beam instability affects the flatness and grain uniformity of crystallized polysilicon films
Solution Approach 1:
The laser beam is divided into two separate beams by the beam splitter. Each beam travels through a different path, allowing independent compensation of asymmetries. The first beam passes through directly while the second beam is reflected by mirrors, creating two distinct optical paths that can be optimized separately to improve overall beam stability and quality.
Solution Approach 2:
The patent introduces asymmetric optical paths for the two beams. The first beam travels a direct path while the second beam is reflected by mirrors at specific angles, creating asymmetric trajectories. This asymmetric design allows the system to compensate for inherent asymmetries in the laser source by balancing the optical paths differently, thereby improving beam stability and reducing effects on polysilicon film quality.
2Reliability
If beam splitter and reversion assembly are added to compensate for asymmetry, then light beam stability is improved, but device complexity increases
Solution Approach 1:
A beam splitter is introduced as an intermediary component to divide the laser beam into two separate paths. This mediator allows the system to handle beam asymmetry by creating independent optical channels, each of which can be optimized separately. The beam splitter serves as the key intermediary that enables subsequent compensation mechanisms while maintaining a relatively simple overall structure.
Solution Approach 2:
Instead of trying to directly correct the asymmetric laser beam output, the patent inverts the approach by splitting the beam and creating two separate paths where asymmetries can be compensated differently. The second beam is reflected by mirrors to create an inverted or alternative path that compensates for the asymmetries present in the first beam's direct path, thereby stabilizing the combined output.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The optical compensation system enhances the stability of the output light beam, improving the flatness and grain uniformity of polysilicon films, thereby enhancing the quality of the polysilicon layer in excimer laser annealing devices.
Implementation Method 1
a part of the laser beam is reflected by the beam splitter, to form the first light beam
Implementation Method 2
the other part of the laser beam passes through the beam splitter, to form the second light beam
Implementation Method 3
the second light beam is sequentially reflected by the at least two reflective mirrors, enters the beam splitter
Implementation Method 4
using reflective mirrors and a homogenizing lens to form a linear light beam
Data Source
AI summary
An optical compensation system for a laser beam and an excimer laser annealing device are provided in the present disclosure. The optical compensation system for the laser beam includes a laser source, a beam splitter and a reversion assembly. The laser beam emitted by the laser source enters the beam splitter, and is divided by the beam splitter into a first light beam and a second light beam having different transmission paths. The second light beam is reversed and reflected by the reversion assembly, enters the beam splitter, and exits from the beam splitter together with the first light beam. An asymmetry of the second light beam reversed by the reversion assembly is different from an asymmetry of the first light beam.