Optical Condition Determination for Appearance Inspection

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Solution Overview

Problem

Existing optical condition determination methods for appearance inspection often deviate between simulation and actual measurement, making it difficult to derive the optimum optical conditions for effective defect detection.

Innovation Solution

An optical condition determination system that performs optical simulations on surface texture and defect models under various conditions, synthesizes images, calculates evaluation values for defect detectability, and analyzes correlations to find suitable optical conditions for appearance inspection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of time

If optical simulation is used to determine optical conditions, then the determination process can be performed in advance, but the simulation results may deviate from actual measurements making it difficult to derive optimum conditions

Engineering Contradiction:
Improveoptical condition determination timeVSAvoidsimulation-actual measurement alignment
Core Design Contradiction:
Loss of timeVSMeasurement precision

Solution Approach 1:

The system performs optical simulations under multiple different optical conditions (varying illumination angles, wavelengths, polarizations, etc.) and selects the condition that yields the highest evaluation value. By changing simulation parameters systematically and comparing results across conditions, the system derives optimum conditions that better align with actual measurements while maintaining efficient pre-determination.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The system creates synthetic images that replicate actual inspection images by combining simulated surface texture images with simulated defect images. These synthetic images serve as virtual copies that can be evaluated without requiring actual physical measurements, allowing optimization of optical conditions through simulation while maintaining fidelity to real-world inspection scenarios.

Inventive Principle:
Principle #26Copying

2Measurement precision

If multiple optical conditions are simulated to find the optimum, then defect detection accuracy improves, but the computational complexity and processing time increase

Engineering Contradiction:
Improvedefect detection accuracyVSAvoidsimulation system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The optical simulation process is divided into separate modules: surface texture simulation, defect simulation, image synthesis, and evaluation. Each module handles a specific aspect of the simulation independently, allowing for optimized computation of each component and facilitating parallel processing to reduce overall complexity while maintaining comprehensive multi-condition analysis.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system pre-calculates and stores simulation results for various optical conditions in databases before actual inspection occurs. Surface texture images and defect images are simulated in advance under multiple conditions, and these pre-computed results are readily available for rapid comparison and selection during the inspection process, reducing real-time computational burden.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS11378521B2Optical condition determination system and optical condition determination method
Publication Date: 2022.07.05 HITACHI LTD
  • US11378521B2 patent drawing
  • US11378521B2 patent drawing
  • US11378521B2 patent drawing

AI summary

An optical condition determination system includes a simulation execution unit that performs an optical simulation on a surface texture model that models a surface texture of a target object of the appearance inspection, and a defect model that models a defect of the target object, under a plurality of optical conditions to generate a surface texture image and a defect image, an image synthesizing unit that synthesizes the surface texture image and the defect image generated by an optical simulation under the same optical condition to generate a synthetic image, an evaluation value calculating unit that calculates an evaluation value representing easiness of detecting the defect in the synthetic image, a correlation analysis unit that analyzes a correlation between an optical condition and the evaluation value corresponding to the synthetic image, and an optimum condition searching unit that searches for the optical condition suitable for the appearance inspection based on an analysis result of the correlation.