Optical Component Integrated Conductive Element Laser Beam Positioning
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Solution Overview
Problem
Current sensor systems for determining the position and characteristics of a laser beam in lithographic apparatuses require complex and bulky metrology units, which are not feasible in all locations due to space restrictions and reduce the laser beam's power, making precise monitoring and alignment challenging, especially in EUV radiation sources.
Innovation Solution
A system comprising an optical component with an integrated electrically conductive element that monitors the laser beam's position and temperature by measuring electrical resistance, allowing for inline monitoring and adjustment without the need for complex metrology systems, and enabling simultaneous measurement of beam diameter and power.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If complex metrology units are used to monitor laser beam position, then measurement precision is improved, but device complexity and volume increase
Solution Approach 1:
The patent replaces complex optical metrology systems with a simple electrical resistance measurement system. An electrically conductive element is integrated directly into the optical component, and laser beam position is determined by monitoring changes in electrical resistance caused by thermal effects from the laser beam, rather than using complex optical sensors and detectors.
Solution Approach 2:
The optical component itself serves the dual function of both optical processing and sensing. The electrically conductive element integrated into the optical component uses the laser beam's own thermal effect to generate the measurement signal, eliminating the need for separate metrology systems.
2Measurement precision
If laser beam sampling is performed for metrology, then measurement capability is improved, but laser beam power is reduced
Solution Approach 1:
The patent replaces physical laser beam sampling with electrical resistance measurement. Instead of diverting a portion of the laser beam to metrology sensors, the system measures the thermal effect of the laser beam on the conductive element, which does not consume or reduce the laser beam power available for the primary function.
3Measurement precision
If metrology units are added to the laser system, then measurement capability is improved, but space requirements increase
Solution Approach 1:
The patent merges the sensing function with the existing optical component by integrating an electrically conductive element directly into it. This eliminates the need for separate metrology units and reduces the overall system volume, as the sensor is embedded within the component that the laser beam already interacts with.
Solution Approach 2:
The optical component is given multiple functions: it performs its primary optical function and simultaneously serves as the sensing element for laser beam position and temperature measurement through the integrated conductive element.
4Measurement precision
If alignment between position sensors and laser beam is required, then measurement precision is improved, but ease of operation deteriorates
Solution Approach 1:
The optical component automatically serves as the sensing element through its integrated conductive element. Since the conductive element is part of the optical component that the laser beam interacts with, no separate alignment procedure is needed - the component's position and the beam's interaction point are inherently aligned by the physics of the system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise monitoring and adjustment of the laser beam characteristics in volume-restricted areas, reducing the need for bulky metrology systems and maintaining the laser beam's power, thus improving the accuracy and efficiency of the lithographic process.
Implementation Method 1
the laser beam is incident on the electrically conductive element... monitor a physical quantity representative of an electrical resistance of the electrically conductive element
Implementation Method 2
monitor a physical quantity representative of an electrical resistance of the electrically conductive element... determine, based on the physical quantity, at least one selected from the list comprising: a position of the laser beam relative to the optical component; and a temperature of the optical component
Data Source
AI summary
A system, comprising an optical component that, in operational use of the optical component, optically interacts with a laser beam, an electrically conductive element disposed on or within the optical component that, in operational use of the optical component, is exposed to the laser beam, and a monitoring system operative to monitor a physical quantity representative of an electrical resistance of the electrically conductive element and to determine based on the physical quantity, a position of the laser beam relative to the optical component.