Hollow Optical Component Cooling Channels for Low Vibration Flow
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Solution Overview
Problem
Current lithography systems face issues with flow-induced vibrations due to turbulence in cooling fluid flows through hollow structures, which can lead to undesirable dynamic excitation and acoustic pressure waves, particularly in components like optical elements, where minimal vibrations are critical.
Innovation Solution
Designing inlet and outlet channels with a decreasing flow cross section, optimized using alternative manufacturing methods such as selective laser etching or rear-side laser ablation, to reduce turbulence and vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If standard machining methods (grinding, milling, drilling) are used to produce hollow structures, then manufacturing ease is improved, but flow-induced vibrations increase due to non-ideal flow guidance geometries
Solution Approach 1:
The patent applies parameter changes by modifying the geometric parameters of the inlet and outlet channels, specifically making the flow cross-section decrease in the longitudinal direction. This geometric parameter modification optimizes flow guidance to reduce turbulence and flow-induced vibrations while maintaining manufacturability through alternative methods like selective laser etching or rear-side laser ablation.
Solution Approach 2:
The patent replaces conventional mechanical machining methods (grinding, milling, drilling) with alternative manufacturing methods such as selective laser etching or rear-side laser ablation. This substitution enables the production of optimized flow geometries that reduce flow-induced vibrations while maintaining ease of manufacture.
2Temperature
If flow velocity is increased to improve heat transfer, then cooling efficiency is improved, but turbulence and flow-induced vibrations increase
Solution Approach 1:
The patent modifies the flow guidance geometry by making the flow cross-section decrease in the longitudinal direction of inlet and outlet channels. This geometric parameter change optimizes flow characteristics to reduce turbulence and flow-induced vibrations while maintaining effective heat transfer, allowing higher flow velocities without excessive vibration.
Solution Approach 2:
The patent employs curved geometries in the inlet and outlet channels, specifically with decreasing flow cross-sections along the longitudinal direction. These curved, optimized geometries promote smoother flow transitions and reduce turbulence, enabling higher flow velocities to improve heat transfer without generating excessive flow-induced vibrations.
3Object-affected harmful factors
If flow guidance is optimized to reduce turbulence, then flow-induced vibrations decrease, but manufacturing complexity increases
Solution Approach 1:
The patent optimizes flow guidance by modifying geometric parameters of inlet and outlet channels (decreasing flow cross-section in longitudinal direction). This parameter optimization reduces turbulence and flow-induced vibrations. The patent notes that while standard machining methods cannot achieve ideal geometries, alternative methods like selective laser etching or rear-side laser ablation can produce these optimized shapes, balancing manufacturing complexity with vibration reduction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces flow-induced vibrations by 30%-90% compared to conventional designs, ensuring stable fluid flow and minimizing dynamic excitation in optical components.
Implementation Method 1
The flowing fluid can also help improve heat transfer at the surfaces through which it passes (forced convection)
Implementation Method 2
a hollow structure through which a fluid can flow... for the thermal stabilization of components
Implementation Method 3
inlet channel has a flow cross section which decreases... outlet channel has a flow cross section which decreases... to reduce turbulence and vibrations
Data Source
AI summary
A component, for example an optical element or a structural component, comprises: a main body comprising a hollow structure through which a fluid can flow and which has a plurality of cooling channels; a fluid distributor; and a fluid collector. In order to supply the fluid to the cooling channels, the fluid distributor can comprise connection channels that open into a common inlet channel connected to an inlet opening. In order to discharge the fluid from the cooling channels, the fluid collector can comprise connection channels that open into a common outlet channel connected to an outlet opening. The inlet channel can have a flow cross section that decreases starting from a connection channel adjacent to the inlet opening. The outlet channel can have a flow cross section that decreases starting from a connection channel adjacent to the outlet opening.