Optical Coupler Thermal Layout for Precise Photonic Temperature Control

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Solution Overview

Problem

Existing semiconductor photonic devices face challenges in achieving precise temperature control of optical couplers, leading to localized overheating and inefficient heat dissipation, which affects the performance and power consumption of high-speed data transmission.

Innovation Solution

The implementation of a thermally-tuning photonic component with a temperature control member separated from the optical coupler by specific distances and a heat transfer member, combined with a thermal preservation layer to minimize heat loss and ensure uniform heating, thereby improving temperature control and reducing power requirements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a temperature control member is placed close to the optical coupler for efficient heat transfer, then heat dissipation is improved, but localized overheating occurs and temperature control precision deteriorates

Engineering Contradiction:
Improveheat dissipation efficiencyVSAvoidtemperature control precision
Core Design Contradiction:
Loss of energyVSMeasurement precision

Solution Approach 1:

The patent divides the temperature control function into multiple segments: a temperature control member (heater) separated from the optical coupler, and an intermediate heat transfer member (thermal conductor) that bridges them. This segmentation allows the heater to be positioned at an optimal distance to avoid localized overheating while still achieving efficient heat transfer through the thermal conductor with high thermal conductivity material.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a heat transfer member as an intermediary component between the temperature control member and the optical coupler. This intermediary serves as a thermal bridge that efficiently conducts heat from the control member to the coupler while distributing the heat uniformly, preventing localized overheating and improving temperature control precision.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If the temperature control member is separated from the optical coupler to prevent localized overheating, then temperature control precision is improved, but heat dissipation efficiency deteriorates

Engineering Contradiction:
Improvetemperature control precisionVSAvoidheat transfer efficiency
Core Design Contradiction:
Measurement precisionVSLoss of energy

Solution Approach 1:

The heat transfer member acts as a thermal intermediary that bridges the gap between the separated temperature control member and optical coupler. This intermediary is made of high thermal conductivity material to ensure efficient heat transfer while maintaining the beneficial separation distance that prevents localized overheating.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs composite material strategy by using high thermal conductivity material for the heat transfer member, potentially combining different materials with complementary properties to optimize both heat transfer efficiency and thermal distribution uniformity.

Inventive Principle:
Principle #40Composite materials

3Use of energy by moving object

If thermal preservation measures are implemented to reduce heat loss, then power consumption is reduced, but device complexity increases

Engineering Contradiction:
Improvepower consumptionVSAvoidstructure complexity
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The thermal preservation layer uses composite material strategy by selecting materials with specific thermal properties (low thermal conductivity) to minimize heat loss to the substrate. This layer is integrated into the existing device structure, achieving thermal insulation without significantly increasing device complexity.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables precise temperature control of optical couplers, preventing overheating and enhancing the transmission performance of semiconductor photonic devices while reducing power consumption.

Implementation Method 1

a heat transfer member in thermal contact with the optical coupler and configured to transfer heat from the temperature control member to the optical coupler

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a thermal preservation layer underlying the insulator layer of the first substrate

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentUS20250383499A1Semiconductor photonic device and method of manufacturing the same
Publication Date: 2025.12.18 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250383499A1 patent drawing
  • US20250383499A1 patent drawing
  • US20250383499A1 patent drawing

AI summary

A method of manufacturing a semiconductor photonic device includes: providing a first substrate comprising a base layer, an insulator layer overlying the base layer, and a surface layer overlying the insulator layer; forming an optical coupler in the surface layer of the first substrate; forming a temperature control member partially encircling the optical coupler; removing the base layer of the first substrate; and depositing a thermal preservation layer on the insulator layer of the first substrate, wherein the base layer of the first substrate has a first thermal conductivity and the thermal preservation layer has a second thermal conductivity less than the first thermal conductivity.