Optical Element Vibration Damping via Mass Body Integration
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Solution Overview
Problem
Existing vibration damping apparatuses for optical elements in lithography systems face challenges in arranging damping masses due to space constraints, particularly in optical systems where multiple elements are closely packed, leading to difficulties in effectively reducing vibrations and maintaining optical performance.
Innovation Solution
A vibration damping apparatus that uses a holding member connected to a barrel to support a first optical element via a damper element, with a second optical element of different mass and refractive power, allowing for effective vibration damping without the need for additional structural arrangements in tight spaces by utilizing connecting members and damper elements to attenuate vibrations and maintain optical performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple optical elements are arranged at small intervals in a barrel to obtain desired optical performance, then optical performance is improved, but it becomes difficult to arrange vibration damping apparatus for each optical element due to space constraints
Solution Approach 1:
The patent combines multiple optical elements (first optical element and second optical element) and their respective vibration damping structures into a single integrated barrel assembly. The damping masses are positioned within the same barrel, sharing common support structures and alignment mechanisms, thereby reducing the overall complexity of arranging separate damping apparatus for each element while maintaining individual vibration control capability
Solution Approach 2:
The barrel structure serves multiple functions simultaneously: it holds and aligns multiple optical elements, provides mounting structures for damping masses, and maintains the precise relative positioning required for optical performance. This multi-functional design eliminates the need for separate arrangement mechanisms for each optical element's damping apparatus
2Reliability
If vibration damping apparatus is arranged for each optical element, then vibration damping effectiveness is improved, but arrangement space requirements increase
Solution Approach 1:
The patent implements a nested arrangement where damping masses are positioned within the barrel structure itself, utilizing the internal space of the barrel and its support members. The damping apparatus for different optical elements are nested within the same cylindrical volume, maximizing space utilization while providing individualized vibration damping for each optical element
Solution Approach 2:
The patent transitions from a two-dimensional planar arrangement of damping apparatus to a three-dimensional spatial distribution within the barrel. Damping masses are positioned at different radial distances and axial locations within the barrel, utilizing the third dimension (depth/radial direction) to accommodate multiple damping structures without increasing the overall footprint area
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient vibration damping of optical elements, reducing pattern transfer defects on substrates by aligning the natural frequencies of the damping mass and optical elements, thus improving the accuracy and quality of pattern formation in miniaturized and integrated optical systems.
Implementation Method 1
a mass body supported by the holding member via a damper element
Data Source
AI summary
The present invention provides a vibration damping apparatus that performs vibration damping of a first optical element among a plurality of optical elements arranged in a barrel, comprising: a holding member connected to the barrel and configured to hold the first optical element; and a mass body supported by the holding member via a damper element, wherein the mass body includes a second optical element different from the first optical element among the plurality of optical elements.