Optical Device Efficiency Measurement Across All Diffraction Orders

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Solution Overview

Problem

Existing measurement systems struggle to simultaneously measure the diffraction efficiency of all diffraction orders of optical devices, particularly those with large numerical apertures, and achieve uniform distribution across the field of view.

Innovation Solution

A measurement system comprising a light source, objective lens, mirrors, relay lenses, and a sensor is used to direct diffraction beams from optical devices to a sensor, allowing for simultaneous measurement of diffraction efficiency and uniformity by aligning with fiducial marks and utilizing autofocus systems to compensate for substrate sagging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional measurement systems are used to measure diffraction efficiency, then measurement capability is limited, but it is difficult to measure all diffraction orders simultaneously

Engineering Contradiction:
Improvediffraction efficiency measurement capabilityVSAvoidmeasurement throughput
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The measurement system segments the diffraction pattern into multiple diffraction orders and directs each order to a separate sensor through dedicated optical paths with mirrors and relay lenses, enabling simultaneous measurement of all diffraction orders rather than sequential measurement

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system transforms the measurement from a single-dimensional sequential process to a multi-dimensional parallel process by spatially distributing diffraction orders across multiple sensors in different locations, allowing simultaneous detection of multiple diffraction orders

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If large numerical aperture is used to capture diffraction patterns, then measurement coverage is improved, but system complexity increases

Engineering Contradiction:
Improvefield of view coverageVSAvoidoptical system complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The complex optical system is segmented into modular units, each consisting of mirrors and relay lenses that handle specific diffraction orders, making the overall system more manageable and easier to align

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The relay lenses serve multiple functions by both relaying the diffraction patterns to sensors and performing focal plane transformations, reducing the need for additional specialized optical components

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Manufacturing precision

If uniform distribution across field of view is required, then optical quality is improved, but alignment difficulty increases

Engineering Contradiction:
Improveuniformity across field of viewVSAvoidalignment difficulty
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

Fiducial marks are pre-positioned on the optical device before measurement, allowing the system to automatically determine device location and orientation, thereby simplifying the alignment process while ensuring uniform distribution across the field of view

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system uses feedback from the detected fiducial marks to automatically adjust and optimize the alignment of the optical device with the measurement system, ensuring uniform light distribution across the field of view without requiring manual alignment expertise

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system enables efficient measurement of diffraction efficiency and uniformity across all diffraction orders, achieving a numerical aperture near 1, thereby improving throughput and integration into production lines.

Implementation Method 1

Generated light is propagated through the optical device until the light exits the optical device with a diffraction pattern

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

an objective lens disposed in the light beam

Methodology Applied
Scientific EffectLens focusing: Lens

Implementation Method 3

a mirror operable to direct the diffraction beams from the objective lens through two or more relay lenses

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 4

The two or more relay lenses direct the diffraction beams having a diffraction pattern to the sensor

Methodology Applied
Scientific EffectLens transmission: Lens

Data Source

PatentUS12379280B2Method of measuring efficiency for optical devices
Publication Date: 2025.08.05 APPLIED MATERIALS INC
  • US12379280B2 patent drawing
  • US12379280B2 patent drawing
  • US12379280B2 patent drawing

AI summary

Embodiments of the present disclosure relate to measurement systems and methods of measuring efficiency of optical devices. In one example, the measurement systems include a light source, a mirror, an illumination source, and a sensor. The light source provides a light beam to the optical device to be diffracted into diffraction beams having diffraction orders. The diffractions beams form a diffraction pattern. The method includes positioning the optical device in the measurement system and directing the diffraction beams to the sensor. The sensor is operable to measure the efficiency of the optical device by measuring the diffraction pattern.