Optical Device Efficiency Measurement Across All Diffraction Orders
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Solution Overview
Problem
Existing measurement systems struggle to simultaneously measure the diffraction efficiency of all diffraction orders of optical devices, particularly those with large numerical apertures, and achieve uniform distribution across the field of view.
Innovation Solution
A measurement system comprising a light source, objective lens, mirrors, relay lenses, and a sensor is used to direct diffraction beams from optical devices to a sensor, allowing for simultaneous measurement of diffraction efficiency and uniformity by aligning with fiducial marks and utilizing autofocus systems to compensate for substrate sagging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional measurement systems are used to measure diffraction efficiency, then measurement capability is limited, but it is difficult to measure all diffraction orders simultaneously
Solution Approach 1:
The measurement system segments the diffraction pattern into multiple diffraction orders and directs each order to a separate sensor through dedicated optical paths with mirrors and relay lenses, enabling simultaneous measurement of all diffraction orders rather than sequential measurement
Solution Approach 2:
The system transforms the measurement from a single-dimensional sequential process to a multi-dimensional parallel process by spatially distributing diffraction orders across multiple sensors in different locations, allowing simultaneous detection of multiple diffraction orders
2Area of stationary object
If large numerical aperture is used to capture diffraction patterns, then measurement coverage is improved, but system complexity increases
Solution Approach 1:
The complex optical system is segmented into modular units, each consisting of mirrors and relay lenses that handle specific diffraction orders, making the overall system more manageable and easier to align
Solution Approach 2:
The relay lenses serve multiple functions by both relaying the diffraction patterns to sensors and performing focal plane transformations, reducing the need for additional specialized optical components
3Manufacturing precision
If uniform distribution across field of view is required, then optical quality is improved, but alignment difficulty increases
Solution Approach 1:
Fiducial marks are pre-positioned on the optical device before measurement, allowing the system to automatically determine device location and orientation, thereby simplifying the alignment process while ensuring uniform distribution across the field of view
Solution Approach 2:
The system uses feedback from the detected fiducial marks to automatically adjust and optimize the alignment of the optical device with the measurement system, ensuring uniform light distribution across the field of view without requiring manual alignment expertise
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables efficient measurement of diffraction efficiency and uniformity across all diffraction orders, achieving a numerical aperture near 1, thereby improving throughput and integration into production lines.
Implementation Method 1
Generated light is propagated through the optical device until the light exits the optical device with a diffraction pattern
Implementation Method 2
an objective lens disposed in the light beam
Implementation Method 3
a mirror operable to direct the diffraction beams from the objective lens through two or more relay lenses
Implementation Method 4
The two or more relay lenses direct the diffraction beams having a diffraction pattern to the sensor
Data Source
AI summary
Embodiments of the present disclosure relate to measurement systems and methods of measuring efficiency of optical devices. In one example, the measurement systems include a light source, a mirror, an illumination source, and a sensor. The light source provides a light beam to the optical device to be diffracted into diffraction beams having diffraction orders. The diffractions beams form a diffraction pattern. The method includes positioning the optical device in the measurement system and directing the diffraction beams to the sensor. The sensor is operable to measure the efficiency of the optical device by measuring the diffraction pattern.


