Optical Device With Multi-Depth Trench Structures
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Solution Overview
Problem
There is a demand for optical devices with varied structures that possess optimized characteristics for high-speed semiconductor applications, but existing devices have simple structures and lack precision in manufacturing multiple structures with different depths.
Innovation Solution
An optical device is designed with a substrate, a trench, a clad layer, and optical transfer structures comprising first and second layers with different depths and shapes, including connecting structures that interconnect them, allowing for precise control of depth and width to enhance light transfer efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple structures with different depths are manufactured, then optical transfer characteristics are optimized, but manufacturing precision requirements increase
Solution Approach 1:
The optical transfer structure is divided into multiple depth levels with distinct functional regions. The first depth region includes a light coupler for optical coupling, while the second depth region includes waveguides for light transmission. This segmentation allows each region to be optimized independently for its specific function while maintaining overall manufacturing feasibility through systematic processing
Solution Approach 2:
The patent introduces vertical depth as an additional dimension for structural differentiation. By arranging optical structures at multiple depth levels rather than varying only horizontal dimensions, the patent achieves optimized optical transfer characteristics without increasing planar complexity. The connecting structures bridge these vertical levels, enabling multi-dimensional optical path control
2Adaptability or versatility
If structures with varied depths are created, then individual optical device characteristics are optimized, but device complexity increases
Solution Approach 1:
Different regions of the optical transfer structure are assigned different depths and shapes according to their specific functional requirements. The light coupler region extends to a first depth optimized for optical coupling efficiency, while waveguide regions extend to a second depth optimized for light transmission. This local differentiation of structural properties enables optimized device characteristics without requiring complete redesign of the entire structure
Solution Approach 2:
The patent implements nested structural arrangements where optical structures at different depths are integrated within a unified device architecture. The connecting structures are configured to interconnect structures at the first depth with structures at the second depth, creating a nested hierarchical organization that reduces overall device complexity while maintaining functional versatility
3Productivity
If precise depth control is implemented, then light transfer efficiency is improved, but manufacturing difficulty increases
Solution Approach 1:
The patent employs preliminary actions in the manufacturing process to establish precise depth control. Etching stop patterns are formed beforehand to define the boundaries of different depth regions, and sacrificial structures are prepared in advance to enable selective removal and depth differentiation. These preliminary preparations facilitate precise depth control during subsequent processing steps while maintaining manufacturing feasibility
4Reliability
If connecting structures with varying width are designed, then optical coupling between structures is optimized, but manufacturing precision requirements increase
Solution Approach 1:
The connecting structures are designed with asymmetric width profiles that gradually transition between different regions. The width of the connecting structures varies along the optical path to optimize coupling efficiency between structures at different depths. This asymmetric design allows for smooth optical mode matching while the gradual variation keeps manufacturing precision requirements manageable compared to abrupt width changes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The optical device achieves optimal optical transfer characteristics by compressing or expanding light in vertical and horizontal directions, improving light transfer efficiency through its unique structure and manufacturing method.
Implementation Method 1
The optical device achieves optimal optical transfer characteristics by compressing or expanding light in vertical and horizontal directions
Data Source
AI summary
An optical device includes a substrate; a trench in a portion of the substrate; a clad layer arranged in the trench; a first structure arranged on the clad layer to have a first depth; and a second structure arranged on the clad layer to have a second depth different from the first depth.