Optical Displacement Meter Dynamic Mask Correction

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Solution Overview

Problem

Optical displacement meters using the triangulation method face challenges in accurately measuring object profiles due to multiple-reflected light and positional deviations, which cause unnecessary peaks in light receiving amount distributions, leading to inaccurate measurements.

Innovation Solution

An optical displacement meter that uses split light or spot light scanned in one direction, with a light receiving unit comprising multiple pixels to detect peak positions, generates temporary profile data, and corrects for positional deviations by adjusting a mask region to exclude irrelevant light receiving amounts, ensuring accurate profile measurement even with positional changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a shielding frame is set to exclude unnecessary peaks in the light receiving amount distribution, then measurement accuracy is improved, but the system cannot adapt to positional deviations of the workpiece

Engineering Contradiction:
Improveprofile measurement accuracyVSAvoidadaptability to positional deviation
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The mask region is made dynamically adjustable based on detected peak positions. Instead of using a fixed shielding frame, the system detects peaks in the light receiving amount distribution and automatically adjusts the mask region to cover only unnecessary peaks while preserving regions containing valid measurement data, even when the workpiece position deviates.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system implements feedback by detecting the actual peak positions in the light receiving amount distribution and using this information to adjust the mask region. The control unit continuously monitors the light receiving amounts and modifies the mask region accordingly, creating a closed-loop system that adapts to positional deviations while maintaining measurement accuracy.

Inventive Principle:
Principle #23Feedback

2Ease of operation

If the mask region is fixed based on reference data, then setup simplicity is improved, but measurement accuracy deteriorates when positional deviation occurs

Engineering Contradiction:
Improvesetup simplicityVSAvoidprofile measurement accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The system performs preliminary action by registering reference data and setting an initial mask region during setup. This preliminary configuration provides a starting point for measurement, simplifying the initial setup process while enabling subsequent automatic adjustments based on detected peak positions.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The mask region transitions from a static reference-based setting to a dynamic configuration that adjusts automatically based on detected peak positions. This dynamic adjustment maintains measurement accuracy even when the workpiece position deviates from the reference position.

Inventive Principle:
Principle #15Dynamics

3Quantity of substance

If all light receiving amounts are used for profile generation, then data completeness is improved, but measurement accuracy deteriorates due to multiple-reflected light

Engineering Contradiction:
Improvelight receiving amount data completenessVSAvoidprofile measurement accuracy
Core Design Contradiction:
Quantity of substanceVSMeasurement precision

Solution Approach 1:

The system extracts and removes the harmful component (multiple-reflected light) from the light receiving amount distribution by identifying unnecessary peaks and applying a mask region to exclude them. This selective extraction preserves the valid measurement data while eliminating the interfering signals that would otherwise corrupt the profile measurement.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The mask region applies local quality by selectively masking only the specific regions containing unnecessary peaks while leaving other regions unaffected. This localized approach ensures that valid measurement data outside the masked regions is preserved and used for accurate profile generation.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for accurate measurement of object profiles by ignoring irrelevant light receiving amounts and adapting to positional deviations, preventing unnecessary peaks from moving out of or into the mask region, thus maintaining measurement accuracy.

Implementation Method 1

The present invention relates to an optical displacement meter that detects a displacement of a measurement object by a triangulation method.

Methodology Applied
Scientific EffectTriangulation method:

Implementation Method 2

a light receiving unit that includes a plurality of pixels arranged in the first direction and a second direction intersecting with the first direction, receives reflected light from each position of the measurement object in the first direction

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS10746536B2Optical displacement meter
Publication Date: 2020.08.18 KEYENCE CORP
  • US10746536B2 patent drawing
  • US10746536B2 patent drawing
  • US10746536B2 patent drawing

AI summary

There is provided an optical displacement meter capable of accurately measuring a profile of a measurement object even when multiple reflections are caused. At the time of setting, reference data indicating a reference profile of a measurement object is registered by a registration unit, and a mask region is set to the reference data by a setting unit. At the time of measurement, reflected light from the measurement object is received by a light receiving unit, and a peak in an output light receiving amount distribution is detected by a peak detection unit. Temporary profile data of the measurement object is generated by a profile generation unit based on a position of the detected peak. A position of the mask region for the temporary profile is corrected by a correction unit.