Optical Element Driving System with Perpendicular Displacement Conversion
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Solution Overview
Problem
Conventional driving systems for semiconductor exposure apparatuses face challenges in minimizing size and thickness while maintaining precise optical element movement, often resulting in increased thickness due to the parallel arrangement of actuators and displacement conversion mechanisms, which can lead to unwanted displacements and potential actuator breakage.
Innovation Solution
A driving system comprising a linear actuator, a displacement picking unit, and a direction converting unit, where the displacement picked out by the picking unit is converted into a perpendicular direction using a linkage mechanism, allowing for precise movement of optical elements with reduced thickness and minimized unwanted displacements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the actuator and displacement conversion mechanism are arranged in parallel along the optical axis direction, then the driving system can achieve precise optical element movement, but the thickness of the fixed barrel increases
Solution Approach 1:
The patent repositions the displacement conversion mechanism from a parallel arrangement along the optical axis to a perpendicular arrangement. The actuator extends in a first direction (radial), the displacement picking unit extends in a second direction (axial), and the direction converting unit converts displacement to the third direction (optical axis). This dimensional reconfiguration reduces the optical axis thickness while preserving movement precision.
2Manufacturing precision
If the actuator is positioned to convert displacement in the optical axis direction, then optical element positioning accuracy is improved, but the risk of actuator breakage increases due to unwanted displacements
Solution Approach 1:
The displacement picking unit acts as an intermediary that selectively extracts displacement only in the optical axis direction from the actuator's movement. This intermediary mechanism filters out unwanted displacements in radial directions, protecting the actuator from breakage while maintaining positioning accuracy.
Solution Approach 2:
The displacement picking unit extracts only the useful component of actuator displacement (in the optical axis direction) while leaving out the harmful components (radial displacements). This selective extraction prevents actuator damage while preserving the needed positioning function.
3Device complexity
If a conventional parallel arrangement of actuator and displacement conversion mechanism is used, then the structure is simple, but the installation area and costs increase
Solution Approach 1:
The patent arranges the actuator, displacement picking unit, and direction converting unit in a nested, multi-dimensional configuration. The actuator extends radially, the picking unit extends axially, and the conversion unit integrates their movements in the optical axis direction. This nested arrangement compactly packs the mechanism, reducing installation area while maintaining functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a compact driving system with reduced thickness, improved precision, and reduced risk of actuator breakage, while allowing for accurate adjustment of optical elements, enhancing the optical performance and reducing installation area and costs.
Implementation Method 1
driving means, such as a laminated piezoelectric actuator
Data Source
AI summary
A driving system for driving an optical element in a first direction. The system includes a linear actuator for producing a displacement in a second direction perpendicular to the first direction, a displacement picking unit being extendable in a third second direction, perpendicular to both of the first and second directions, for picking out a displacement of the linear actuator, and a direction converting unit, disposed at the third-direction second-direction side of the linear actuator, for converting a direction of the displacement picked out by the displacement picking unit into a third direction, perpendicular to both the first and second directions.