Optical Element Module with Elastic Contact Device
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Solution Overview
Problem
In optical systems used for fabricating semiconductor devices, there is a challenge in maintaining high imaging accuracy and reducing parasitic loads introduced into optical elements due to misalignment and frictional contact, which can lead to imaging errors and stress on the components.
Innovation Solution
The optical element module incorporates a support structure with an elastically deformable contact device that minimizes tilting moments and aligns the instantaneous center of motion close to the contact surfaces, reducing the deviation between theoretical and actual motion, thereby reducing parasitic loads and maintaining even contact pressure distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a support structure with rigid contact elements is used to hold the optical element, then the structural stability is improved, but parasitic loads and contact stress are introduced into the optical element causing imaging errors
Solution Approach 1:
The patent changes the mechanical parameters of the contact elements by making them elastically deformable rather than rigid. The contact elements are designed with specific elastic properties that allow them to deform under load, thereby reducing parasitic stresses while maintaining stable positioning of the optical element throughout the exposure process.
Solution Approach 2:
The support structure incorporates dynamically adaptable contact elements that can adjust their position and deformation state in response to applied loads. This dynamic capability allows the structure to maintain optimal contact conditions while minimizing harmful parasitic loads on the optical element during different phases of operation.
2Manufacturing precision
If the contact elements are made elastically deformable to reduce parasitic loads, then the imaging accuracy is improved, but the device complexity increases
Solution Approach 1:
The patent employs thin, flexible contact elements that can be integrated into the support structure. These elements are designed with appropriate thickness and material properties to provide the necessary elastic deformation while maintaining structural integrity. The flexible nature of these thin elements allows them to conform to the optical element surface, reducing imaging errors without requiring complex adjustment mechanisms.
3Stress or pressure
If the instantaneous center of motion is aligned close to the contact surfaces to minimize tilting moments, then the contact pressure distribution becomes more even, but the design complexity of the support structure increases
Solution Approach 1:
The patent designs the support structure to create an equipotential condition at the contact interface by positioning the instantaneous center of motion close to the contact surfaces. This geometric arrangement ensures that tilting moments are minimized and contact pressure is distributed evenly across the contact area, reducing stress concentrations while maintaining a relatively simple overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces parasitic loads and maintains high imaging accuracy by minimizing stress and misalignment issues, ensuring consistent performance throughout the exposure process and extending the system's operational lifespan.
Implementation Method 1
The first linking section and the second linking section are elastically deformed in response to a bending moment resulting from the resulting holding force
Data Source
AI summary
An optical element module includes an optical element unit and a support structure. The optical element module includes an optical element. The support structure includes a support device and a contact device connected to the support device. A surface of the contact device contacts a surface of the optical element unit and exerts a holding force on the optical element unit along a holding force direction.