Optical Fiber Temperature Sensor with Black Body Emitter

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Solution Overview

Problem

Conventional temperature monitoring systems in high-temperature substrate processing lack suitable sensors that can survive and function at temperatures above 500°C, providing inadequate temperature control and being susceptible to RF interference and corrosion.

Innovation Solution

The development of optical fiber temperature sensors with a black body emitter fused on the fiber end, made from melted high emissivity material integrated in melted silica, which are embedded in the substrate platform to provide precise temperature monitoring and control during high-temperature processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional temperature sensors are used in high-temperature substrate processing, then the sensors can be manufactured with standard materials, but the sensors fail to survive and function at temperatures above 500°C and are susceptible to RF interference and corrosion

Engineering Contradiction:

Improvesensor survival and function at high temperatureVSAvoidRF interference and corrosion susceptibility

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent replaces conventional electrical temperature sensors with an optical fiber-based temperature sensor that uses optical principles (light transmission through the fiber) to measure temperature. This substitution eliminates the mechanical/electrical components that are susceptible to RF interference and high-temperature damage, while maintaining the ability to function reliably at temperatures above 500°C.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs composite material structures in the optical fiber sensor, including the fiber optic cable combined with the black body emitter material. The optical fiber provides electrical insulation and RF immunity, while the black body emitter material provides high-temperature stability and emissivity for accurate temperature measurement, creating a composite system that overcomes the limitations of individual materials.

Inventive Principle:

Principle #40Composite materials

2Measurement precision

If optical fiber temperature sensors with black body emitter are used, then temperature monitoring precision is improved and RF interference is eliminated, but the manufacturing process becomes more complex

Engineering Contradiction:

Improvetemperature monitoring precisionVSAvoidsensor structure complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the temperature-sensing function from a complex electrical sensor system and implements it through a simplified optical fiber-based system. By removing electrical components and using purely optical principles (light transmission and black body radiation), the design achieves high measurement precision while reducing overall system complexity despite the specialized materials required.

Inventive Principle:

Principle #2Taking out (Extraction)

3Ease of manufacture

If conventional heating elements are used for substrate heating, then the heating process is simple, but temperature uniformity across the substrate is poor causing differential processing

Engineering Contradiction:

Improveheating process simplicityVSAvoidtemperature uniformity across substrate

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent segments the heating function by distributing multiple optical fiber heating elements across the substrate platform, allowing independent control of temperature in different zones. This segmentation enables precise control of temperature uniformity across the substrate while maintaining the simplicity of optical fiber heating technology.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

These sensors enable improved temperature feedback and control, allowing for precise thermal management of substrates at temperatures up to 650°C or higher, while being resistant to mechanical and chemical damage and immune to RF interference.

Implementation Method 1

a black body emitter fused on the fiber end, the black body emitter including melted high emissivity material included integrally in melted silica

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

a lead-in fiber including a fiber end

Methodology Applied

Scientific EffectOptical fiber transmission: Optical Fibre

Data Source

PatentUS10520371B2Optical fiber temperature sensors, temperature monitoring apparatus, and manufacturing methods

Publication Date: 2019.12.31 APPLIED MATERIALS INC

AI summary

An optical fiber temperature sensor including a lead-in fiber and black body emitter. The lead-in optical fiber includes a fiber end, and the black body emitter is fused on the fiber end, wherein the black body emitter is made up of a melted high emissivity material included integrally in melted silica. Further embodiments include temperature monitoring apparatus with one or more optical fiber temperature sensors, and electronic device processing apparatus including optical fiber temperature monitoring. Numerous other aspects and embodiments are included.