Optical Fiber Etching for Radiation Absorption

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Solution Overview

Problem

Current optical fibers used in lithographic apparatuses face challenges with radiation absorption and scattering due to surface contaminants and stress, leading to reduced damage thresholds and mechanical performance.

Innovation Solution

A method involving a manufacturing intermediate with an outer tube and inner tubes arranged in ring structures, where the internal surface is etched to remove contaminants and reduce stress before drawing into a hollow-core anti-resonant-reflecting fiber, improving the surface quality and optical properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional optical fibers are used without surface treatment, then manufacturing is simpler, but radiation absorption and scattering increase due to surface contaminants and stress

Engineering Contradiction:
Improvedamage thresholdVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by performing etching of the internal surface during the manufacturing process before the fiber is completed and deployed. This advance treatment removes contaminants and reduces stress on the internal surface, preventing future radiation absorption and scattering issues. The etching step is incorporated into the manufacturing workflow, so the fiber enters service already optimized for its intended application.

Inventive Principle:
Principle #10Preliminary action

2Loss of energy

If internal surface etching is performed to remove contaminants, then radiation absorption decreases, but manufacturing complexity increases

Engineering Contradiction:
Improveradiation absorptionVSAvoidmanufacturing process complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent utilizes the etching process to create a modified surface structure on the internal wall of the optical fiber. This treatment creates a surface with controlled porosity or texture that reduces radiation absorption and scattering. The etched surface structure acts similarly to porous materials by interacting with radiation in a beneficial way, reducing energy loss while the process is integrated into standard manufacturing.

Inventive Principle:
Principle #31Porous materials

3Strength

If internal surface etching is performed to reduce stress, then mechanical performance improves, but manufacturing complexity increases

Engineering Contradiction:
Improvemechanical performanceVSAvoidmanufacturing process complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The patent applies parameter changes by modifying the physical-chemical parameters of the internal surface through etching. This process alters the surface stress state, microstructure, and mechanical properties of the internal wall. By controlling etching parameters such as duration, chemical composition, and temperature, the manufacturing process optimizes mechanical performance while keeping the process integrated and manageable within existing manufacturing capabilities.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the optical fiber's ability to guide radiation with reduced absorption and scattering, increasing the damage threshold and mechanical performance by creating a smoother, contaminant-free surface.

Implementation Method 1

etching the internal surface of the manufacturing intermediate using an etching substance

Methodology Applied
Scientific EffectEtching:

Data Source

PatentUS11999645B2Optical fibers and production methods therefor
Publication Date: 2024.06.04 ASML NETHERLANDS BV
  • US11999645B2 patent drawing
  • US11999645B2 patent drawing
  • US11999645B2 patent drawing

AI summary

An optical fiber, manufacturing intermediate for forming an optical fiber and a method for forming an optical fiber. The method includes providing a manufacturing intermediate having an elongate body and having an aperture extending through the elongate body along an axial dimension of the elongate body, a boundary of the aperture defining an internal surface of the manufacturing intermediate. The method further includes etching the internal surface of the manufacturing intermediate using an etching substance, and drawing the manufacturing intermediate along the axial dimension so as to form the optical fiber.