Optical Fiber Heating for Substrate Temperature Uniformity
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Solution Overview
Problem
Conventional electronic device manufacturing systems lack precise temperature control during substrate processing, leading to differential processing outcomes due to small temperature variations across the substrate.
Innovation Solution
A substrate temperature control apparatus and system utilizing optical fibers for light-based heating, coupled with a thermal contact member and a temperature controller to provide precise temperature control, allowing for individually or zonally controllable heat sources.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional resistive heaters or plasma exposure are used for heating, then heating function is provided, but temperature uniformity and precision are insufficient
Solution Approach 1:
The heating system is segmented into multiple independent optical fiber heating zones distributed across the substrate surface. Each optical fiber or group of fibers can be independently controlled to provide localized heating, enabling precise temperature control across different regions of the substrate to eliminate temperature variations that cause differential processing
Solution Approach 2:
The patent applies local quality by providing individually controllable heating zones through optical fibers at different locations on the substrate. This allows each region to receive customized heating intensity according to its specific requirements, achieving uniform temperature distribution and preventing differential processing caused by temperature gradients
2Temperature
If resistive heaters are used for heating, then heating is provided, but temperature control precision is insufficient
Solution Approach 1:
The patent replaces conventional resistive heating elements with optical fiber-based heating systems. Optical fibers deliver light energy that is converted to heat at the substrate surface, providing more precise temperature control with faster response times. The optical control system allows for independent adjustment of multiple heating zones without the mechanical complexity of conventional heater assemblies
3Temperature
If plasma exposure is used for heating, then heating is provided, but localized temperature control is difficult
Solution Approach 1:
The heating system is divided into multiple independent optical fiber zones that can be individually activated or adjusted. This segmentation allows selective heating of specific substrate regions while maintaining other areas at different temperatures, providing the localized temperature control needed for various processing requirements while maintaining system versatility
Solution Approach 2:
The optical fiber heating system provides multi-functionality by enabling both uniform heating across the entire substrate and localized heating of specific regions. The same system can be adapted for different processing techniques and substrate types, replacing multiple specialized heating systems with a single versatile optical-based platform
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves improved temperature uniformity and precision, enabling controlled heating and cooling of substrates to specific temperatures, addressing the limitations of existing systems by providing localized and adjustable temperature control.
Implementation Method 1
a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and the thermal contact member
Data Source
AI summary
Substrate temperature control apparatus including optical fiber temperature control are described. Substrate temperature control apparatus includes a base, a thermal contact member proximate to the base, and a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and thermal contact member. Substrate temperature control systems and electronic device processing systems and methods including optical fiber temperature control are described, as are numerous other aspects.