Groove-Routed Optical Fiber Heating for Substrate Temperature Uniformity
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Solution Overview
Problem
Conventional electronic device manufacturing systems face challenges in achieving precise temperature control during high-temperature processing, such as PECVD, due to small variations in substrate temperature leading to uneven deposition.
Innovation Solution
A substrate temperature control apparatus utilizing groove-routed optical fibers for light-based heating, which provides individually controllable pixelated heat sources or zonal control, supplementing or replacing resistive heating to achieve precise temperature control above 500°C.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If resistive heaters are used in the pedestal, then heating function is provided, but temperature uniformity across the substrate deteriorates
Solution Approach 1:
The heating system is segmented into multiple independent optical fiber heating zones arranged in a grid pattern across the pedestal surface. Each zone can be independently controlled to provide localized heating, enabling precise temperature uniformity across the substrate area and compensating for heat loss variations at different locations.
Solution Approach 2:
Different regions of the pedestal are equipped with optical fiber heating elements that can be independently activated based on local temperature requirements. This allows for non-uniform heating profiles when needed, or uniform heating when all zones are activated together, providing flexibility to maintain optimal temperature distribution across the entire substrate surface.
2Temperature
If conventional resistive heating is used, then heating is provided, but temperature control precision above 500°C deteriorates
Solution Approach 1:
Conventional resistive heating elements are replaced with optical fiber-based heating systems that transmit light energy through optical fibers to generate heat at the substrate surface. This optical heating method provides superior temperature control precision at high temperatures above 500°C and enables the use of non-contact optical temperature measurement techniques, eliminating interference from resistive heating components.
3Adaptability or versatility
If optical fibers are routed in grooves, then temperature control flexibility is improved, but device complexity increases
Solution Approach 1:
Grooves are pre-formed in the pedestal structure during manufacturing to guide and position the optical fibers. This preliminary structuring simplifies the subsequent installation process, as the grooves automatically provide mechanical support and alignment for the fibers, reducing the need for complex positioning mechanisms while enabling flexible temperature profile configurations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables improved temperature control and flexibility, allowing for precise temperature tuning and uniform or non-uniform temperature profiles as needed, enhancing the consistency of high-temperature processing in electronic device manufacturing.
Implementation Method 1
a plurality of optical fibers adapted to provide light-based heating extending within the grooves
Data Source
AI summary
Substrate temperature control apparatus including groove-routed optical fibers. Substrate temperature control apparatus includes upper and lower members including grooves in one or both, and a plurality of optical fibers routed in the grooves. In one embodiment, the optical fibers are adapted to provide light-based pixelated heating. In another embodiment, embedded optical temperature sensors are adapted to provide temperature measurement. Substrate temperature control systems, electronic device processing systems, and methods including groove-routed optical fiber temperature control and measurement are described, as are numerous other aspects.