Optical Fiber Substrate Support Links Across RF Hot and Cold Regions
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Solution Overview
Problem
Existing substrate processing systems face challenges in efficiently transmitting power and data across RF hot and RF cold regions due to the use of bulky, expensive, and difficult-to-service RF filters and copper cables, which are sensitive to RF interference and require complex tuning for different frequencies.
Innovation Solution
The system employs optical fibers to transmit both power and data between RF hot and RF cold regions, using a light source to convert optical energy into DC power within the RF hot region, reducing the need for RF filters and minimizing RF interference, and utilizing optical splitters for bi-directional data communication.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If RF filters and copper cables are used to transmit power and data between RF hot and RF cold regions, then power and data transmission can be achieved, but the system becomes bulky, expensive, and difficult to service
Solution Approach 1:
The patent replaces the mechanical/electrical system of RF filters and copper cables with an optical system using optical fibers, optical receivers, and optical transmitters. This substitution eliminates the need for complex RF filtering components and copper cable management, directly resolving the contradiction by achieving reliable power transmission through optical-to-electrical conversion while dramatically reducing system complexity
Solution Approach 2:
The patent introduces optical fibers as an intermediary medium to transmit power and data between RF hot and RF cold regions. The optical fiber acts as a mediator that carries optical signals through the RF environment without being affected by RF interference, then converts to electrical signals at the destination, solving both reliability and complexity issues
2Adaptability or versatility
If copper cables are used for data communication, then data can be transmitted, but the system is sensitive to RF interference and requires complex tuning for different frequencies
Solution Approach 1:
The patent replaces the electrical copper cable communication system with an optical communication system. Optical fibers are inherently immune to RF interference and do not require frequency tuning, as they transmit data through light pulses rather than electrical signals. This substitution directly eliminates RF interference sensitivity and provides universal frequency adaptability
Solution Approach 2:
The patent changes the fundamental transmission parameter from electrical signals in copper cables to optical signals in fibers. This parameter change transforms the system from being sensitive to RF electromagnetic fields to being completely immune, as optical signals operate at frequencies vastly different from RF ranges and do not interact with RF fields
3Object-affected harmful factors
If RF filters are used to block RF interference, then data transmission can occur, but the filters are bulky and expensive
Solution Approach 1:
The patent extracts and removes the RF filters from the system entirely by switching to optical communication. Instead of trying to block RF interference through filters, the system eliminates the vulnerability by using optical fibers that do not interact with RF fields, thereby removing the bulky and expensive filtering components
Solution Approach 2:
The patent introduces optical fibers as an intermediary that naturally isolates the data communication path from RF interference without requiring active filtering. The optical fiber medium itself provides the isolation, eliminating the need for separate RF filter components
4Reliability
If multiple cables and connection points are used for power and data transmission, then reliable connections can be maintained, but maintenance becomes more difficult and system reliability decreases
Solution Approach 1:
The patent merges power transmission and data communication into a single optical fiber infrastructure. Both power and data are transmitted through the same optical medium, reducing the number of separate cables and connection points. This consolidation improves maintenance ease while maintaining connection reliability through fewer potential failure points
Solution Approach 2:
The patent creates a universal optical communication infrastructure that handles both power transmission and data communication functions. The optical fiber system serves multiple purposes simultaneously, eliminating the need for separate dedicated cables for each function and thereby simplifying maintenance while ensuring reliable connections
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in a more compact, cost-effective, and reliable power transmission and data communication system that is independent of RF frequency or amplitude, simplifying maintenance and allowing for fewer cable counts and connection points, thereby enhancing system reliability and ease of service.
Implementation Method 1
an optical receiver to receive the optical signal from the optical fiber and to convert the optical energy into DC power
Data Source
AI summary
A substrate support assembly comprises a first optical receiver, a power converter, a first circuit, and a first optical transmitter, all embedded in the substrate support assembly. The first optical receiver is configured to receive a first optical signal and a first optical data through a fiber optic cable. The power converter is configured to generate DC power based on the first optical signal and the first optical data received by the first optical receiver. The first circuit is configured to receive the DC power from the power converter and to receive a second data from a sensor disposed in the substrate support assembly in response to the first optical data. The first optical transmitter is configured to transmit the second data as a second optical data through the fiber optic cable.