Optical Fiber Temperature Sensor with Substrate Light Path

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Solution Overview

Problem

Existing temperature measurement devices are difficult to install and require electric power, limiting their installation flexibility and temperature measurement range.

Innovation Solution

A temperature measurement sensor with an optical fiber on a substrate, featuring a light introduction path and optical coupling portion that allows communication between spaces above and below the substrate, enabling easy installation and operation without electric power, using backscattered light for temperature measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a conventional temperature measurement device is used, then temperature measurement can be performed, but the device is difficult to install and requires electric power

Engineering Contradiction:

Improveease of installationVSAvoidelectric power requirement

Core Design Contradiction:

Ease of operationVSUse of energy by moving object

Solution Approach 1:

The patent replaces conventional electrical temperature measurement systems with an optical fiber-based measurement system. The optical fiber sensor uses light propagation and backscattering phenomena instead of electrical circuits, eliminating the need for power supply to the sensor itself while enabling easy installation in environments where electrical power cannot be provided.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an optical coupling portion as an intermediary component that facilitates light transmission between the light introduction path and the optical fiber. This intermediary enables efficient optical coupling without requiring direct contact or complex alignment, simplifying the overall system structure and installation process.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Adaptability or versatility

If a battery-operated temperature measurement device is used, then portability is improved, but temperature measurement range is limited by battery operating temperature

Engineering Contradiction:

Improvetemperature measurement rangeVSAvoidbattery operation limitation

Core Design Contradiction:

Adaptability or versatilityVSUse of energy by moving object

Solution Approach 1:

The patent replaces battery-powered electronic temperature measurement devices with a passive optical fiber-based system. Since optical fibers do not require electrical power and can operate across extreme temperature ranges, the system achieves adaptability to environments from cryogenic to high-temperature conditions without being constrained by battery operating limitations.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If light introduction path is provided through substrate, then optical coupling is improved, but light loss may occur

Engineering Contradiction:

Improveoptical coupling efficiencyVSAvoidlight loss

Core Design Contradiction:

ReliabilityVSLoss of energy

Solution Approach 1:

The patent introduces an optical coupling portion as an intermediary component positioned at the interface between the light introduction path and the optical fiber. This coupling portion optimizes light transmission by matching optical impedances and reducing reflection losses, thereby improving optical coupling efficiency while minimizing light loss through the substrate interface.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution allows for easy installation and reduced temperature measurement time, eliminating the need for batteries and expanding the temperature measurement range beyond battery-operated limits, while minimizing light loss and positional deviations.

Implementation Method 1

an optical fiber provided on an upper surface of the substrate and extending along the upper surface

Methodology Applied

Scientific EffectOptical fiber transmission: Optical Fibre

Implementation Method 2

using backscattered light for temperature measurement

Methodology Applied

Scientific EffectBackscattered light: Scattering

Implementation Method 3

an optical coupling portion provided on the upper surface and disposed in the light introduction path. The optical coupling portion is optically connected to an end surface of the optical fiber

Methodology Applied

Scientific EffectOptical coupling: Refraction

Data Source

PatentUS11841278B2Temperature measurement sensor, temperature measurement system, and temperature measurement method

Publication Date: 2023.12.12 TOKYO ELECTRON LTD

AI summary

A temperature measurement sensor according to an exemplary embodiment includes a substrate and an optical fiber provided on an upper surface of the substrate and extending along the upper surface. The temperature measurement sensor further includes a light introduction path of a space that allows a space above the upper surface and a space below a lower surface of the substrate to communicate with each other and an optical coupling portion provided on the upper surface and disposed in the light introduction path. The optical coupling portion is optically connected to the end surface of the optical fiber. The optical fiber forms the first pattern shape and the second pattern shape. The first pattern shape includes the optical fiber more densely than the second pattern shape. Light incident on the optical coupling portion from a side of the lower surface through the light introduction path reaches the end surface through the optical coupling portion.