Optical Filter Module for Surface Haze Detection
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Solution Overview
Problem
Existing surface-inspection methods struggle to accurately detect surface haze on materials, particularly compound semiconductor wafers, due to interference from photoluminescence signals.
Innovation Solution
The method involves using an optical filter module to filter out photoluminescence signals during surface haze inspection, allowing only light with specific wavelengths to be detected, thereby reducing interference and enhancing accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional laser scattering inspection methods are used to detect surface haze, then the inspection can be performed on material surfaces, but the detection accuracy is degraded due to photoluminescence signal interference
Solution Approach 1:
The patent extracts and removes the harmful photoluminescence signal from the detection system by using an optical filter module that selectively blocks photoluminescence wavelengths while transmitting the surface haze scattering signal wavelengths, thereby eliminating the interference and improving measurement precision
Solution Approach 2:
The patent introduces an optical filter module as an intermediary component between the laser source and the detector. This filter acts as a mediator that selectively transmits the surface haze scattering signal while blocking the photoluminescence signal, enabling accurate detection without interference
2Productivity
If laser irradiation is used to detect surface properties, then inspection efficiency is improved, but surface haze signal detection is compromised due to photoluminescence interference
Solution Approach 1:
The patent changes the wavelength parameters of the optical system by using an optical filter module with specific transmission and blocking wavelength ranges. The filter is configured to transmit the surface haze scattering signal wavelengths while blocking the photoluminescence wavelengths, thereby maintaining inspection efficiency while improving detection accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables authentic and accurate surface haze inspection by eliminating photoluminescence interference, resulting in more reliable quality control of materials.
Implementation Method 1
an optical filter module is configured in surface haze inspection to filter off the photoluminescence signal of the materials in the light path to the detector
Implementation Method 2
the laser is irradiated onto the surface of a material to be inspected
Implementation Method 3
Surface haze refers to a non-directional light-scattering phenomenon caused by surface morphology
Implementation Method 4
the photoluminescence of the materials may become one of the non-negligible factors affecting accurate detection
Data Source
AI summary
The present invention provides a method for detecting surface haze of materials, comprising: optionally, preliminary inspection, which is conducted on materials, to identify the materials with no visible surface defects; and surface haze inspection, to detect the surface haze of the materials; wherein an optical filter module is configured in surface haze inspection setup to filter off the photoluminescence signal of the materials in the light path to the detector, so as to avoid the photoluminescence signal being detected by the detector. The invention further provides a setup for detecting surface haze of materials. By using the invented method and setup for detecting surface haze, it is possible to accurately obtain the surface haze value and/or distribution of the materials.