Optical Filter Structure to Suppress Metal Film Migration

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Solution Overview

Problem

Existing light detection devices face reliability issues due to metal film migration, which affects the accuracy and longevity of multispectral light detection across various wavelength bands.

Innovation Solution

A light detection device incorporating a metal film with openings smaller than the incident light wavelength and barrier metals on the corners of the filter to prevent metal film migration, while maintaining plasmon resonance for selective wavelength detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a metal film is used as a filter for multispectral light detection, then plasmon resonance can be achieved for selective wavelength detection, but metal film migration occurs which reduces device reliability

Engineering Contradiction:
Improvedevice reliabilityVSAvoidmetal film stability
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

A barrier metal layer is introduced as an intermediary between the metal film and the substrate. This barrier metal prevents direct interaction between the metal film and substrate, thereby suppressing metal film migration while allowing the metal film to maintain its plasmon resonance properties for light detection

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The filter structure is transformed from a single metal film into a composite structure consisting of a metal film combined with a barrier metal layer. This composite structure leverages the plasmon resonance properties of the metal film while utilizing the migration-resistant properties of the barrier metal to improve overall stability

Inventive Principle:
Principle #40Composite materials

2Reliability

If the metal film is made thinner to reduce migration, then reliability improves, but plasmon resonance effectiveness decreases

Engineering Contradiction:
Improvedevice reliabilityVSAvoidlight detection accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The barrier metal serves as a mediator that enables the use of thinner metal films without compromising reliability. It provides structural support and prevents migration, allowing the metal film thickness to be reduced while maintaining both reliability and plasmon resonance effectiveness

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If barrier metal is added to prevent migration, then reliability improves, but device complexity increases

Engineering Contradiction:
Improvedevice reliabilityVSAvoidfilter structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The barrier metal is applied selectively only at critical locations where migration is most likely to occur, rather than covering the entire metal film. This localized approach prevents migration and improves reliability while minimizing the increase in device complexity

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively suppresses metal film migration, enhancing the reliability and accuracy of light detection across multiple spectral bands, thereby improving the device's performance and longevity.

Implementation Method 1

detects light of four or more wavelength bands (four or more bands) (multiple spectra) by means of surface plasmons

Methodology Applied
Scientific EffectPlasmon resonance: Resonance

Implementation Method 2

a photoelectric converter that converts light entering through the filter into an electric charge

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS20250022897A1Light detection device and optical filter
Publication Date: 2025.01.16 SONY SEMICON SOLUTIONS CORP
  • US20250022897A1 patent drawing
  • US20250022897A1 patent drawing
  • US20250022897A1 patent drawing

AI summary

A light detection device of an embodiment of the present disclosure includes: a filter including a metal film provided with a plurality of openings each having a size equal to or less than a wavelength of incident light; a barrier metal provided on a corner of the filter, and a photoelectric converter that converts light entering through the filter into an electric charge.