Optical Filtering Device with Stopper-Limited MEMS Shutter
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Solution Overview
Problem
MEMS shutters in optical filtering devices used in dark field microscopes face issues such as sticking to the substrate due to static electricity or moisture, and high stress leading to reduced lifespan, especially when fully opened.
Innovation Solution
Incorporating a stopper on the substrate's side surface and a cut-out portion in the shutter to control the opening angle without fully opening, preventing sticking and reducing stress on the beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the shutter is fully opened to improve light transmission, then the detection sensitivity is improved, but the shutter sticks to the substrate due to static electricity or moisture
Solution Approach 1:
The shutter is designed to open only to a partial extent (approximately 10 degrees) rather than fully opening. The stopper prevents the shutter from opening beyond this controlled angle, ensuring sufficient light transmission while maintaining a safe distance from the substrate to avoid sticking caused by static electricity or moisture.
2Reliability
If the shutter is fully opened to improve detection sensitivity, then more light is transmitted, but the stress on the beam increases reducing lifespan
Solution Approach 1:
The stopper limits the shutter opening angle to approximately 10 degrees, providing partial opening that is sufficient for detection sensitivity while preventing full opening that would generate excessive stress on the beam and reduce its lifespan.
Solution Approach 2:
The stopper acts as a preventive measure that limits the maximum opening angle before excessive stress can be applied to the beam. By controlling the opening angle in advance, the stopper prevents stress accumulation that would otherwise occur during full opening operations.
3Productivity
If the shutter opening angle is increased to improve light transmission, then the detection capability is enhanced, but the risk of sticking and stress increases
Solution Approach 1:
The shutter is designed to open to a controlled angle of approximately 10 degrees, which provides sufficient light transmission for effective defect detection while preventing excessive opening that would cause sticking or beam stress, thus maintaining operational stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures reliable operation by controlling the shutter at a desired angle, preventing sticking and reducing stress, thus enhancing the reliability of defect inspection devices.
Implementation Method 1
a shutter (212) configured to be open and closed by voltage control
Data Source
AI summary
To provide a highly reliable optical filtering device used as a spatial filter of a dark field microscope, which is capable of controlling a shutter at a desired opening angle without fully opening the shutter. The shutter configured to be open and closed by voltage control; and a substrate having a shutter opening portion serving as a movable region of the shutter are included. The substrate has a stopper provided on a side surface of the shutter opening portion and extending in a thickness direction of the substrate, any cross section of the stopper in the thickness direction of the substrate having substantially the same shape, the shutter has a cut-out portion, and when the shutter is open, the cut-out portion abuts against the stopper.