Optical Filter Array With Variable Spacers for Sub-10 μm Channel Spacing
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Solution Overview
Problem
Existing optical devices, such as sensor element arrays, face challenges in achieving sensor element spacings of less than approximately 20 μm, 10 μm, or 1 μm due to limitations in manufacturing techniques and filter coating technologies.
Innovation Solution
The implementation of a filter array on a substrate with a first mirror and a plurality of spacers, where each spacer has a specific thickness and is associated with a channel having a separation width of less than approximately 10 μm or 5 μm, allowing for reduced spacing between sensor elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional manufacturing techniques and filter coating technologies are used, then existing optical devices can be produced, but sensor element spacing cannot be reduced below approximately 20 μm
Solution Approach 1:
The filter array is segmented into multiple discrete filter elements, each with specific optical properties. This segmentation allows independent optimization of each filter element's spacing and characteristics, enabling reduced overall spacing while maintaining manufacturing feasibility through modular construction approaches.
Solution Approach 2:
The patent transitions from planar filter arrangements to three-dimensional structures utilizing spacers of varying thicknesses. By introducing vertical dimensionality through spacers with different thicknesses (first thickness, second thickness), the system achieves reduced horizontal spacing between sensor elements while maintaining optical performance through multi-layer spatial configuration.
2Productivity
If sensor element spacing is reduced to enhance density, then device performance improves, but manufacturing precision requirements increase significantly
Solution Approach 1:
The patent employs systematic parameter changes in spacer thicknesses to control and standardize sensor element spacing. By defining specific thickness parameters for spacers (first thickness, second thickness, third thickness), the system achieves precise spacing control at reduced dimensions, enabling high density while maintaining manufacturability through parameter standardization.
Solution Approach 2:
Different regions of the filter array utilize spacers with locally optimized thicknesses tailored to specific channel requirements. This local quality approach allows customized spacing for different sensor element pairs, achieving high overall density while maintaining precise local spacing control where needed most for optimal optical performance.
3Manufacturing precision
If multiple spacers with different thicknesses are used to achieve reduced spacing, then channel separation width decreases, but filter array complexity increases
Solution Approach 1:
The patent merges multiple filter functions into a unified filter array structure where spacers serve dual purposes: both mechanical support elements and optical path definers. By combining these functions into single components, the system achieves reduced channel separation width without proportionally increasing overall structural complexity.
Solution Approach 2:
The spacer elements are designed as universal components that perform multiple functions simultaneously: providing mechanical support, defining optical channels, controlling spacing, and enabling alignment. This multi-functionality reduces the need for separate specialized components, thereby achieving precise channel separation while limiting complexity growth.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the manufacturing of sensor element arrays with reduced spacings between sensor elements, enhancing the density and performance of optical devices such as depth sensing systems.
Implementation Method 1
The filter array may include a first mirror disposed on the substrate... The filter array may include a second mirror disposed on the spacer
Implementation Method 2
A first spacer layer, of the plurality of spacer layers, may be disposed onto the first mirror and covering a set of sensor elements... A second spacer layer, of the plurality of spacer layers, may be disposed onto the first spacer layer
Data Source
AI summary
A device may include a filter array disposed on a substrate. The filter array may include a first mirror disposed on the substrate. The filter array may include a plurality of spacers disposed on the first mirror. A first spacer, of the plurality of spacers, may be associated with a first thickness. A second spacer, of the plurality of spacers, may be associated with a second thickness that is different from the first thickness. A first channel corresponding to the first spacer and a second channel corresponding to the second spacer may be associated with a separation width of less than approximately 10 micrometers (μm). The filter array may include a second mirror disposed on the plurality of spacers.


