Liquid Flow Path Contamination Detection Using Optical Stay Monitoring
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Solution Overview
Problem
Existing liquid processing apparatuses are prone to operational downtime due to foreign substances in the flow path, leading to increased downtime and inefficiencies.
Innovation Solution
A method involving a substrate processing process, stay process, flow-through process, signal acquisition process, and response process to detect and address foreign substances in the flow path using a light irradiator and receiver, enabling estimation of abnormal locations and executing appropriate responses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If foreign substance detection is performed continuously during operation, then productivity is improved by preventing downtime, but device complexity increases due to additional detection mechanisms
Solution Approach 1:
The system performs a stay process where liquid is filled and kept stationary in the flow path before detection, allowing foreign substances to settle and be detected more effectively. This preliminary action prepares the detection conditions in advance, enabling better detection sensitivity without requiring complex continuous monitoring systems during operation.
Solution Approach 2:
The detection is performed periodically by alternating between stay processes (where liquid remains stationary for detection) and flow-through processes (where liquid flows normally). This periodic detection approach maintains productivity while enabling foreign substance detection at intervals, preventing prolonged downtime without requiring constant complex monitoring.
2Measurement precision
If the flow path is kept stationary for detection, then measurement precision is improved, but productivity decreases due to operation interruption
Solution Approach 1:
Instead of stopping the entire system for detection, the invention applies partial action by isolating a specific portion of the flow path (a branch line) for the stay and detection process. The main system continues operating while only a portion of the liquid flow is diverted for stationary detection, thus maintaining overall productivity while achieving precise measurement in the detected portion.
Solution Approach 2:
The flow path is segmented into a main line for continuous operation and a branch line for stationary detection. This segmentation allows the detection function to be performed in isolation without interrupting the main processing flow, enabling both high measurement precision during stay processes and maintained productivity through parallel operation.
3Reliability
If cleaning operations are performed frequently to remove foreign substances, then reliability is improved, but loss of time increases due to maintenance interruptions
Solution Approach 1:
The system performs preliminary detection of foreign substances through the stay process before they can cause significant problems. By detecting foreign substances early when they first appear in the stationary liquid, the system can schedule maintenance at optimal intervals, preventing reliability issues before they occur while minimizing unnecessary maintenance interruptions.
Solution Approach 2:
The detection system provides feedback about foreign substance presence and accumulation rates. This feedback enables predictive maintenance scheduling, where cleaning operations are performed based on actual contamination levels rather than fixed intervals, maintaining high reliability while reducing unnecessary maintenance downtime.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents increased downtime by effectively detecting and addressing foreign substances in the flow path, ensuring continuous operation of the liquid processing apparatus.
Implementation Method 1
a signal acquisition process for irradiating the flow path with a light by a light irradiator and receiving the light from the flow path by the light receiver, during the flow-through process, to acquire a detection signal output from the light receiver according to a foreign substance in the liquid
Data Source
AI summary
A liquid processing method includes: a substrate processing process for allowing a processing liquid to flow through a flow path connecting a reservoir and a processing liquid supply, and be discharged to a substrate from the processing liquid supply, thereby processing the substrate; a stay process for filling the flow path with a liquid and keeping the liquid stay in the flow path; a flow-through process for allowing the staying liquid to flow through the flow path; a signal acquisition process for irradiating the flow path with a light by a light irradiator and receiving the light from the flow path by the light receiver, to acquire a detection signal output from the light receiver according to a foreign substance in the liquid; and a response process for estimating an abnormal location in the flow path based on the detection signal, and presenting or executing a response operation.