Optical Focus Ring Transfer Alignment for Plasma Processing
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Solution Overview
Problem
Existing transfer systems for focus rings in semiconductor manufacturing face challenges in accurately positioning focus rings relative to substrates without physical contact, which can lead to misalignment and potential damage during plasma processing.
Innovation Solution
A transfer system incorporating a position detection system with multiple optical elements and a controller to calculate the positional relationship between the focus ring and the placing table using reflected light, allowing for precise adjustment of the focus ring's transfer position based on polar coordinates, thereby preventing contact and ensuring accurate alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a transfer device transfers the focus ring into the substrate processing chamber, then the focus ring can be positioned for plasma processing, but misalignment and potential damage may occur during transfer
Solution Approach 1:
The patent replaces mechanical contact-based positioning with a non-contact optical measurement system. The measurement light source and optical elements detect the focus ring's position through light reflection without physical contact, eliminating mechanical interference and damage risks during the transfer and positioning process
Solution Approach 2:
The patent introduces measurement light as an intermediary between the transfer device and the focus ring. The optical elements transmit measurement light to illuminate the focus ring and receive reflected light, serving as a non-contact mediator to detect position information and enable precise positioning without direct mechanical contact
2Measurement precision
If multiple optical elements scan the focus ring position, then positioning precision is improved, but system complexity increases
Solution Approach 1:
The patent divides the measurement task among multiple optical elements positioned at different locations. Each optical element scans a specific angular range and detects position information from a particular direction, segmenting the overall measurement process into multiple coordinated sub-tasks that collectively achieve comprehensive high-precision positioning
Solution Approach 2:
The patent transitions from one-dimensional linear scanning to two-dimensional angular scanning by arranging multiple optical elements around the chamber in different angular positions. This dimensional expansion allows simultaneous measurement from multiple perspectives, significantly improving positioning precision while the coordinated control system manages the increased complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively suppresses contact between the focus ring and the placing table, ensuring accurate and precise positioning, which enhances the uniformity of plasma processing and reduces the risk of damage during transfer operations.
Implementation Method 1
The multiple optical elements are configured to output the measurement light generated from the light source as output light and configured to receive reflected light
Data Source
AI summary
A transfer system configured to transfer a focus ring includes a processing system and a position detection system. The processing system includes a processing apparatus including a chamber main body and a placing table having a substrate placing region and a focus ring placing region; and a transfer device configured to transfer the focus ring. The position detection system includes a light source; multiple optical elements configured to output light and receive reflected light; a driving unit configured to move each optical element to allow each optical element to scan a scanning range; and a controller configured to calculate, based on the reflected light in the scanning range, a positional relationship between the placing table and the focus ring for each optical element. The transfer device is configured to adjust a transfer position of the focus ring onto the focus ring placing region based on the calculated positional relationship.