Optical Position Detection for Focus Ring Alignment
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Solution Overview
Problem
Existing processing apparatuses lack the capability to accurately determine the positional relationship between a focus ring and a disk-shaped object, which is crucial for maintaining in-plane uniformity during plasma processing.
Innovation Solution
A position detecting system that includes a transport device, a light source, optical elements, a reflective member, and a controller, which projects measurement light, reflects it, and scans linear ranges to calculate the positional relationship between the focus ring and the object on the placement table based on reflected light.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If no position detection system is implemented, then the device complexity is reduced, but the in-plane uniformity during plasma processing deteriorates
Solution Approach 1:
The patent replaces complex mechanical positioning systems with an optical measurement system. Instead of using multiple sensors or complex mechanical alignment mechanisms, the system uses a light source, optical elements, and a reflective member to non-contactively measure and determine the positional relationship between the focus ring and the object, maintaining simplicity while ensuring processing uniformity.
Solution Approach 2:
The transport device serves dual purposes: it transports the object and simultaneously performs position detection functions through the reflective member mounted on it. This self-service approach eliminates the need for separate detection systems, reducing overall device complexity while maintaining measurement capabilities.
2Measurement precision
If multiple sensors are used to detect positional relationship, then measurement precision improves, but device complexity increases
Solution Approach 1:
The reflective member mounted on the transport device serves multiple functions: it reflects measurement light, scans across multiple linear ranges, and enables positional detection without requiring separate sensors. This multi-functional design achieves high measurement precision while minimizing the number of components in the system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate determination of the object's position relative to the focus ring, ensuring proper placement and maintaining in-plane uniformity during plasma processing, thereby improving processing quality.
Implementation Method 1
The reflective member reflects the projection light toward the placement table, and reflects the reflected light of the projection light, which is projected toward the placement table, toward the optical element
Data Source
AI summary
A position detecting system has a transport device, a light source, at least one optical element, a reflective member, a drive unit, and a controller. The transport device transports and places an object on a placement table. The light source generates measurement light. The optical element projects the measurement light, as projection light, generated by the light source and receives reflected light. The reflective member is disposed on the transport device. The reflective member reflects the projection light toward the placement table, and reflects the reflected light of the projection light, which is projected toward the placement table, toward the optical element. The drive unit operates the transport device so that the reflective member scans a plurality of linear scanning ranges. The controller calculates positional relationship between the focus ring and the object placed on the placement table based on the reflected light within the plurality of linear scanning ranges.