Optical Component Frame with Flexible Mounting

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Solution Overview

Problem

Optical components, such as obscuration stops, experience undesired shifts due to thermal expansion in projection exposure apparatuses, affecting the precision of micromirror arrays and illumination systems.

Innovation Solution

An optical component is designed with a frame that fixes the optical element in a direction perpendicular to its expansion, limiting displacement to less than a quarter of the maximum change in length, using a material with high thermal conductivity for efficient heat dissipation and a low coefficient of linear expansion, ensuring the frame remains stable and non-deformable.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If the optical element is fixed rigidly in the frame, then the position stability is improved, but the thermal expansion stress increases causing deformation

Engineering Contradiction:

Improveposition stabilityVSAvoidthermal expansion stress

Core Design Contradiction:

Stability of the object's compositionVSStrength

Solution Approach 1:

The patent changes the mechanical parameters of the mounting structure by introducing a flexible mounting element that can deform elastically. This allows the optical element to expand thermally while maintaining position stability through the flexible mounting mechanism that accommodates the expansion without rigid constraints.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite structure combining a flexible mounting element with a frame of different material properties. The flexible mounting element is made of a material with higher thermal expansion coefficient than the frame, creating a composite system that balances thermal expansion accommodation with position stability.

Inventive Principle:

Principle #40Composite materials

2Manufacturing precision

If the frame is made very stiff to prevent deformation, then the manufacturing precision is improved, but the thermal conductivity decreases reducing heat dissipation efficiency

Engineering Contradiction:

Improveframe stabilityVSAvoidheat dissipation efficiency

Core Design Contradiction:

Manufacturing precisionVSUse of energy by moving object

Solution Approach 1:

The patent applies local quality by differentiating the thermal and mechanical properties of different frame components. The frame is designed with regions of varying thermal conductivity, allowing efficient heat dissipation in certain areas while maintaining structural stiffness in others, thus optimizing both heat management and mechanical stability.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent uses composite materials with different thermal and mechanical properties for different parts of the frame structure. This allows simultaneous optimization of heat dissipation capability and structural stiffness, as each material component can be selected for its specific thermal and mechanical characteristics.

Inventive Principle:

Principle #40Composite materials

3Strength

If the optical element is allowed to expand freely, then the thermal stress is reduced, but the position precision deteriorates due to displacement

Engineering Contradiction:

Improvethermal stressVSAvoidposition precision

Core Design Contradiction:

StrengthVSMeasurement precision

Solution Approach 1:

The patent changes the boundary conditions of the optical element by introducing a flexible mounting element that provides controlled constraints. This allows the element to expand partially freely while maintaining position precision through the elastic deformation capability of the mounting structure, which accommodates thermal expansion without rigid restriction.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The flexible mounting element acts as an intermediary between the optical element and the rigid frame. It mediates the thermal expansion by providing a compliant connection that allows some degree of freedom while maintaining overall position stability, thus reducing thermal stress without compromising position precision.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration maintains the optical element's position with high precision, reducing thermal-induced shifts by more than 50% and preventing deformation, thus enhancing the stability and accuracy of the optical assembly.

Implementation Method 1

the frame is embodied in such a way that it has a linear expansion of at most 0.01% in the transverse direction even in the case of a linear expansion of the optical element in the transverse direction by up to 1%

Methodology Applied

Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 2

using a material with high thermal conductivity for efficient heat dissipation

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS9915872B2Optical component

Publication Date: 2018.03.13 CARL ZEISS SMT GMBH

AI summary

The disclosure provides an optical component that includes an optical element fixed in the transverse direction in a frame. The frame has a linear expansion of at most 0.01% in the transverse direction even in the case of a linear expansion of the optical element in the transverse direction by up to 1%.