Wafer-Level Optical Gas Sensor with 3D Reaction Chamber
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Solution Overview
Problem
Current optical gas sensors are complex and difficult to miniaturize, making them costly and unsuitable for mass production, while existing solid-state gas sensors require micro-heaters and are prone to detection failures due to contamination and high temperatures.
Innovation Solution
An optical gas sensor design featuring a substrate with a light source, reaction chamber structure, and light detector, where the light travels a longer path than the straight-line distance between them, enhancing signal identification capability and integrating these components on a wafer-level platform.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a traditional optical gas sensor uses a simple straight-line light path, then the device structure is simple, but the sensitivity and detection capability are insufficient
Solution Approach 1:
The patent transforms the light path from a simple straight line to a multi-dimensional曲折 path by introducing a reaction chamber structure with specific geometric features. The light travels through multiple segments (first, second, and third light paths) that are arranged in space to form a longer effective path length, thereby enhancing detection capability without proportionally increasing device complexity.
Solution Approach 2:
The optical path is segmented into multiple distinct sections (first light path, second light path, third light path) that pass through different regions of the reaction chamber. This segmentation allows the light to traverse a longer total distance through the gas sample, improving sensitivity while maintaining a manageable structural complexity through modular path design.
2Measurement precision
If the optical gas sensor uses a complicated optical system to enhance detection, then the sensitivity improves, but the device cannot be easily miniaturized and fabricated in batch production
Solution Approach 1:
The patent merges the optical detection function with the reaction chamber structure into a single integrated component. The reaction chamber structure serves dual purposes: it provides the physical space for gas reactions and simultaneously defines the optical path geometry. This integration eliminates the need for separate complex optical components, enabling miniaturization and batch fabrication while maintaining sensitivity.
Solution Approach 2:
The reaction chamber structure performs multiple functions: it contains the gas sample, provides optical path definition, and serves as the detection region. This multi-functionality reduces the number of separate components needed, simplifying manufacturing and enabling wafer-level fabrication while preserving the enhanced detection capability through the optimized optical path.
3Measurement precision
If the light path length is increased to enhance detection sensitivity, then the signal identification capability improves, but the device volume increases
Solution Approach 1:
The patent achieves extended light path length by utilizing three-dimensional spatial arrangement rather than simply extending the path in one direction. The light paths are configured in multiple dimensions within the reaction chamber, allowing a long effective path length to be achieved within a compact overall device volume through efficient spatial utilization.
Solution Approach 2:
The optical paths are nested within the reaction chamber structure, with the light paths fitting inside the chamber volume. The first, second, and third light paths are arranged to maximize path length within the available chamber space, effectively nesting the optical detection function within the reaction chamber without requiring additional external volume.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies and miniaturizes the optical gas sensor, improving its performance and reducing costs, enabling effective gas detection with enhanced sensitivity and specificity, suitable for various applications including home monitoring and industrial safety.
Implementation Method 1
at least one light detector disposed in the substrate, and at least one reaction chamber structure disposed in the substrate and connected between the light source and the light detector
Data Source
AI summary
In the optical gas sensor of the application, a three-dimensional reaction chamber structure is used to replace the traditional simple structure, so that the performance of the gas sensor can be enhanced in a wafer-level size. Besides, a light source, a reaction chamber and a light detector are integrated into one wafer in an exemplary embodiment, so as to achieve the wafer-level integration. In addition, the optical gas sensor can detect various gases simultaneously and has wide application in fields such as home environment monitoring, industrial safety, and disease diagnosis and treatment.