Optical Gyroscope Sensor Using Light Beam Phase Detection

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Solution Overview

Problem

Conventional capacitive gyroscope sensors require multiple subpixels and mask layers for detecting Coriolis forces on different axes, leading to complex structures and increased manufacturing costs.

Innovation Solution

The development of an optical gyroscope sensor system that uses light sources and receivers to detect phase changes in light beams resulting from Coriolis forces, allowing for reduced subpixel count and simplified fabrication by employing a gyro disk with channels for light beam passage and electrodes for oscillating vibrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional capacitive gyroscope sensors use multiple subpixels and mask layers to detect Coriolis forces on different axes, then measurement precision is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
ImproveCoriolis force detection capabilityVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces the conventional capacitive mechanical sensing system with an optical sensing system. Instead of using multiple capacitive subpixels and mask layers to detect Coriolis forces, the invention uses a single gyro disk with light sources and receivers that detect phase changes in light beams caused by Coriolis forces. This substitution of mechanical capacitive sensing with optical sensing eliminates the need for complex multi-subpixel structures while maintaining detection capability across multiple axes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements a universal sensing approach where a single gyro disk structure with channels can detect Coriolis forces on multiple axes simultaneously. The light beam can pass through different channels in the gyro disk to sense vibrations and Coriolis forces in different directions, making the system multi-functional without requiring separate dedicated sensing structures for each axis.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If conventional capacitive gyroscope sensors use multiple subpixels for detecting Coriolis forces on different axes, then measurement precision is improved, but manufacturing cost increases

Engineering Contradiction:
ImproveCoriolis force detection capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent replaces the conventional capacitive mechanical sensing system with an optical sensing system. Instead of using multiple capacitive subpixels and mask layers to detect Coriolis forces, the invention uses a single gyro disk with light sources and receivers that detect phase changes in light beams caused by Coriolis forces. This substitution of mechanical capacitive sensing with optical sensing eliminates the need for complex multi-subpixel structures while maintaining detection capability across multiple axes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If conventional capacitive gyroscope sensors use multiple subpixels and mask layers, then detection capability is improved, but sensor area increases

Engineering Contradiction:
ImproveCoriolis force detection capabilityVSAvoidsensor area
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The patent implements a universal sensing approach where a single gyro disk structure with channels can detect Coriolis forces on multiple axes simultaneously. The light beam can pass through different channels in the gyro disk to sense vibrations and Coriolis forces in different directions, making the system multi-functional without requiring separate dedicated sensing structures for each axis.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent replaces the conventional capacitive mechanical sensing system with an optical sensing system. Instead of using multiple capacitive subpixels and mask layers to detect Coriolis forces, the invention uses a single gyro disk with light sources and receivers that detect phase changes in light beams caused by Coriolis forces. This substitution of mechanical capacitive sensing with optical sensing eliminates the need for complex multi-subpixel structures while maintaining detection capability across multiple axes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient detection of Coriolis forces on multiple axes with fewer subpixels, reducing the sensor area and manufacturing complexity while maintaining effective vibration sensing capabilities.

Implementation Method 1

in the case of rotation of the microstructure with respect to a pre-determined gyroscopic axis with an angular velocity, is subjected to a Coriolis force proportional to the angular velocity itself

Methodology Applied
Scientific EffectCoriolis force: Coriolis Force

Implementation Method 2

sensing an optical signal corresponding to a wave phase change of a light beam resulting from a Coriolis force

Methodology Applied
Scientific EffectPhase change of light beam:

Implementation Method 3

a first electrode configured to apply an oscillating vibration to the gyro disk

Methodology Applied
Scientific EffectOscillating vibration:

Data Source

PatentUS8776600B2Gyroscope sensors
Publication Date: 2014.07.15 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US8776600B2 patent drawing
  • US8776600B2 patent drawing
  • US8776600B2 patent drawing

AI summary

A gyroscope sensor includes a gyro disk. A first light source is configured to provide a first light beam. A first light receiver is configured to receive the first light beam for sensing a vibration at a first direction of the gyro disk. A second light source is configured to provide a second light beam substantially parallel with the first light beam. A second light receiver is configured to receive the second light beam for sensing a vibration in a second direction of the gyro disk. The second direction is different from the first direction.