Optical Gyroscope Ring Resonator Layout for Higher Q-Factor
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Solution Overview
Problem
Conventional resonant micro-photonic gyroscopes (RMGs) face limitations in performance due to low quality factors (Q-factors) of their resonators, which restrict the minimum measurable angular velocity and precision in orientation change detection.
Innovation Solution
The integration of a ring resonator and waveguide with wedge-shaped side walls on a substrate, forming obtuse angles, enhances the Q-factor and reduces electromagnetic mode losses, leading to improved angular velocity measurement precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If optical gyroscopes are manufactured using conventional methods, then device complexity is reduced, but manufacturing precision deteriorates due to difficulty in aligning optical components
Solution Approach 1:
The patent merges the optical components (first optical system, second optical system, light source, photodetector) into a single integrated device housing. The first and second optical systems are positioned at different locations within the same housing, allowing light to traverse through the gyroscope in a controlled manner while maintaining precise alignment through the integrated structure.
Solution Approach 2:
The optical path is segmented into distinct sections with the first optical system handling one portion of light traversal and the second optical system handling another portion. This segmentation allows each optical system to be optimized and aligned independently while contributing to the overall precise alignment of the gyroscope.
2Measurement precision
If the light traversal path length is increased to reduce random errors, then measurement precision improves, but device volume increases
Solution Approach 1:
The patent utilizes a three-dimensional arrangement of optical components within the housing, positioning the first and second optical systems at different locations and orientations. This spatial arrangement allows the light to traverse a longer effective path length while maintaining a compact overall device volume through efficient use of three-dimensional space.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration results in higher Q-factors, enabling lower measurable angular velocities and improved reliability by reducing noise sensitivity to environmental perturbations such as shocks and vibrations.
Implementation Method 1
optical gyroscopes... measure a rotation speed of the optical gyroscope
Data Source
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Figure 3A
AI summary
The disclosed structures and methods are directed to a chip for an optical gyroscope and methods of manufacturing of the chip for the optical gyroscope. The chip comprises a substrate, a waveguide having a first waveguide cladding layer and a waveguide core; and a ring resonator having a first ring cladding layer and a ring resonator core attached to the first ring cladding layer. A side wall of the ring resonator core forms an obtuse angle with an upper surface of the substrate. The method comprises depositing a first cladding layer on an upper surface of a silicon substrate; depositing a core layer; depositing a resist mask pattern to define a form of a ring resonator core and a form of a waveguide core; etching the core layer outside of the resist mask pattern; and stripping the resist mask pattern off.