Optical Processing Head With Dynamic Focus for Complex Surfaces

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Solution Overview

Problem

Existing processing apparatuses face challenges in efficiently processing objects with complex shapes, particularly those with surfaces that are concave or have intricate geometries, as they struggle to accurately irradiate and measure these surfaces using traditional optical systems.

Innovation Solution

The processing apparatus employs a Galvano mirror and a meniscus-shaped optical member to change the irradiation position of processing light, allowing it to irradiate surfaces that intersect with a plane perpendicular to the optical axis, and includes a measurement system for precise alignment and measurement, enabling processing of complex shapes by adjusting the light concentration position based on the surface geometry.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a traditional optical system is used to irradiate object surfaces, then the system structure is simple, but it cannot accurately irradiate surfaces that are concave or have intricate geometries

Engineering Contradiction:
Improveability to irradiate complex surfacesVSAvoidoptical system structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent employs a movable optical member (such as a galvanometer-controlled mirror) that can dynamically change the irradiation position of processing light. This dynamic adjustment capability allows the optical system to adapt to various surface geometries including concave and intricate shapes, resolving the contradiction between adaptability and structural simplicity by introducing controlled mobility rather than complex fixed structures

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the irradiation approach by moving the optical member in spatial dimensions rather than complicating the optical path. By controlling the position of the optical member in X, Y, and Z directions, the system can irradiate complex surfaces from optimal angles without requiring complex optical components, thus improving adaptability while maintaining relatively simple device structure

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If the irradiation position is changed by moving optical members, then complex shapes can be processed, but mechanical restrictions may hinder the operation

Engineering Contradiction:
Improveirradiation position adjustmentVSAvoidmovable member operation
Core Design Contradiction:
Adaptability or versatilityVSEase of operation

Solution Approach 1:

The patent designs the optical member to serve multiple functions: it can change irradiation position, maintain optical alignment, and adapt to different surface geometries. This multi-functionality reduces the need for separate mechanisms for each function, simplifying the overall structure and improving ease of operation while maintaining high adaptability for processing complex shapes

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent introduces an intermediary control system that coordinates the movement of optical members with the processing requirements. This intermediary layer (control system) manages the complexity of moving multiple optical components by providing centralized control, thereby easing the operational burden and preventing mechanical restrictions from hindering the system's ability to process complex geometries

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If processing light is condensed on a condensed plane, then processing precision is improved, but the system cannot handle surfaces intersecting with the optical axis plane

Engineering Contradiction:
Improveprocessing precisionVSAvoidsurface geometry handling
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent combines condensed light delivery with dynamic optical member positioning. The optical member can be moved to positions where it intercepts the condensed light from the first optical system and redirects it to irradiate surfaces including those intersecting with the optical axis plane. This dynamic redirection maintains processing precision while extending adaptability to complex surface geometries that traditional fixed condensed plane systems cannot handle

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for effective processing and measurement of objects with complex shapes, improving processing speed and accuracy by avoiding mechanical restrictions that could hinder the operation of movable members, thus enhancing throughput and precision.

Implementation Method 1

a propagating direction of the processing light propagating from the first optical system to the second optical system changes depending on the passing position

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

an irradiation optical system that is configured to condense the processing light to irradiate the object with it, the irradiation optical system emitting the processing light toward a surface that intersects with a plane perpendicular to an optical axis

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

a condensed position of the processing light from the irradiation optical system is changed in an annular area surrounding an optical axis of the irradiation optical system

Methodology Applied
Scientific EffectFocusing: Focusing

Data Source

PatentUS20230142998A1Processing apparatus
Publication Date: 2023.05.11 NIKON CORP
  • US20230142998A1 patent drawing
  • US20230142998A1 patent drawing
  • US20230142998A1 patent drawing

AI summary

A processing apparatus is a processing apparatus that processes an object by a processing light from a processing light source, includes a first optical system that condenses the processing light from the processing light source on a condensed plane; and a second optical system that condenses the processing light from the first optical system to irradiate the object with it, a position in the condensed plane through which the processing light passes is changeable, a propagating direction of the processing light propagating from the first optical system to the second optical system changes depending on the position in the condensed plane through which the processing light passes.