Optical Heating Apparatus with Segmented Light Transmissive Containers
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Solution Overview
Problem
Conventional optical heating apparatuses face limitations in increasing irradiance due to the use of a single large-size quartz window, which results in reduced light transmission and increased heating time, as the thick window is required to withstand differential pressure, distancing light emitting elements from the substrate and causing light transmission loss.
Innovation Solution
The optical heating apparatus disperses heating sources across multiple light transmissive containers, reducing the pressure capacity and thickness of each container, allowing for closer proximity to the substrate, and includes a distance adjuster to optimize irradiance while minimizing in-plane irradiance variation, along with reflectors and cooling fluid nozzles to enhance light efficiency and heat transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single large-size quartz window is used to divide the vacuum area from the non-vacuum area, then the vacuum chamber can be sealed, but the window becomes thick to withstand differential pressure, which increases light transmission loss and reduces irradiance
Solution Approach 1:
The patent divides the single large quartz window into multiple separate light transmissive containers (first, second, third containers), each with its own small quartz window. This segmentation allows each small window to withstand differential pressure effectively while maintaining good light transmission, resolving the contradiction between pressure capacity and irradiance.
2Strength
If the quartz window is thickened to increase pressure capacity, then the window can withstand differential pressure without distortion, but the light emitting elements are distanced from the substrate, reducing irradiance
Solution Approach 1:
By segmenting the window system into multiple small containers, each with thin quartz windows, the patent eliminates the need for thick windows. This allows light emitting elements to be positioned close to the substrate, improving irradiance while maintaining pressure resistance through the distributed container structure.
Solution Approach 2:
The patent transitions from a single-plane window structure to a three-dimensional arrangement of multiple containers positioned at different locations. This dimensional change allows the system to maintain pressure resistance without requiring thick windows, thereby reducing the distance between light sources and substrate.
3Device complexity
If a single large-size quartz window is used, then the structure is simple, but the light transmission loss is large, reducing irradiance and increasing heating time
Solution Approach 1:
The patent segments the window system into multiple small light transmissive containers, each with superior light transmission characteristics. Although the number of components increases, the overall light transmission loss decreases significantly, improving irradiance and reducing heating time.
Solution Approach 2:
The patent changes the parameters of the window system by using multiple small windows instead of one large window. This parameter change optimizes the surface-area-to-volume ratio and light transmission path length, reducing light transmission loss despite increased component count.
4Productivity
If multiple light transmissive containers are used to disperse heating sources, then irradiance increases and heating time reduces, but the device complexity increases
Solution Approach 1:
The patent segments the heating system into multiple independent light transmissive containers, each contributing to the overall heating function. This segmentation enables better light transmission and higher irradiance, improving productivity despite the increased number of components.
Solution Approach 2:
Each light transmissive container serves multiple functions: it acts as a pressure barrier, a light transmission window, and a mounting structure for heating elements. This multi-functionality justifies the increased component count by consolidating multiple roles into each container unit.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration increases irradiance, reduces heating time, and minimizes light transmission loss, allowing for more efficient thermal treatment of substrates by reducing the thickness of light transmissive containers and optimizing the distance between light sources and the substrate.
Implementation Method 1
a plurality of heating sources to optically heat a substrate
Implementation Method 2
the plurality of light transmissive containers transmit light from the heating sources
Implementation Method 3
reflectors and cooling fluid nozzles to enhance light efficiency
Data Source
AI summary
An optical heating apparatus includes: a plurality of heating sources to optically heat a substrate; a plurality of light transmissive containers in which the heating sources are inserted and which transmit light from the heating sources; and a vacuum chamber including a housing having an inside in which the substrate can be placed, the housing having a hole to insert the plurality of light transmissive containers at a position opposed to the substrate placed in the inside, wherein each of the plurality of heating sources has at least one light emitting element, and the plurality of heating sources emit light toward the substrate placed in the vacuum chamber through the plurality of light transmissive containers inserted in the hole and protruding from the housing toward the inside.