Optical Element Holding Structure with Magnetic Coupling
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Solution Overview
Problem
Existing optical element positioning technologies in microlithography struggle to achieve high precision and reproducibility, particularly in eliminating rigid-body movements and ensuring stable contact points for optimal imaging quality.
Innovation Solution
A device with a holding structure that supports optical elements at six discrete contact points, using connecting pins and bearing pins with tapered ends, and coupling elements like clamping or magnetic units to apply forces greater than the optical element's weight, ensuring precise and reproducible positioning through adjustable bearing pins with varying diameters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a kinematically determined holding device with three prism-type holding arms connected via rolling bodies is used, then the optical element can be supported with reduced rigid-body movements, but the positioning precision and reproducibility are insufficient for high imaging quality requirements
Solution Approach 1:
The holding device is segmented into multiple independent holding arms (at least three) that are distributed around the optical element's circumference. Each holding arm independently supports the optical element at discrete contact points, allowing precise positioning control while maintaining overall stability. This segmentation enables the system to achieve both high reliability and manufacturing precision.
Solution Approach 2:
The patent replaces traditional mechanical connection mechanisms with a magnetic field-based holding system. Magnets are used to create magnetic forces that hold the optical element in position without direct mechanical contact, eliminating friction and mechanical wear while achieving precise and reproducible positioning. This substitution resolves the contradiction by providing both stability and precision.
2Device complexity
If conventional holding structures are used, then the device structure is simple, but the contact points cannot ensure high reproducibility and precision for optimal imaging quality
Solution Approach 1:
The holding structure is designed with universal features that serve multiple functions: the holding arms simultaneously provide structural support, define precise contact points, and enable reproducible positioning. The magnetic field system also serves dual purposes of holding and positioning. This multi-functionality maintains structural simplicity while achieving high manufacturing precision.
Solution Approach 2:
The patent changes the fundamental parameter of contact from mechanical to magnetic interaction. By using magnetic field strength and distribution as controllable parameters, the system achieves precise and reproducible contact point positioning without complex mechanical adjustments, resolving the contradiction between structural simplicity and positioning precision.
3Manufacturing precision
If the optical element is supported at multiple discrete contact points with coupling elements applying force, then positioning precision is improved, but the device complexity increases due to additional components
Solution Approach 1:
The patent merges the holding and positioning functions into a unified magnetic field system. Instead of separate mechanical holding components and positioning mechanisms, the magnetic field simultaneously provides both functions. This consolidation reduces the number of discrete components while maintaining high positioning accuracy through the six discrete contact points.
Solution Approach 2:
By replacing complex mechanical coupling elements with magnetic field interactions, the patent reduces device complexity. The magnetic forces naturally apply at the discrete contact points defined by the holding arms, eliminating the need for additional mechanical force application mechanisms while maintaining positioning precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-precision and reproducible positioning of optical elements, reducing mechanical stresses and allowing for exact alignment adjustments by exchanging bearing pins, thereby enhancing imaging quality in microlithography projection exposure apparatuses.
Implementation Method 1
In advantageous configurations, the coupling elements are configured as clamping and/or force-generating units
Data Source
AI summary
A device for an optical arrangement includes an optical element and a holding structure. The optical element makes contact with the holding structure at six discrete contact points. Coupling elements are provided, by which it is possible to apply a force at the contact points. A component of the force is greater than the weight force of the optical element in terms of absolute value and/or direction.