Optical Imprint Curable Composition Ink Jet Adequacy
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Solution Overview
Problem
Current curable compositions for optical imprinting face challenges in ink jet adequacy and releasability, with surfactants and fluorine-containing compounds affecting surface tension and viscosity, leading to poor ink jet ejection properties and increased defects in pattern formation.
Innovation Solution
A curable composition containing a polymerizable compound, a photopolymerization initiator, and a compound with a specific polyalkylene glycol structure, as defined by General Formula (I), which improves ink jet adequacy and releasability by maintaining suitable surface tension and viscosity for efficient ink jet ejection and mold separation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If surfactants or fluorine-containing compounds are added to improve releasability, then mold separation becomes easier, but ink jet ejection properties deteriorate due to changed surface tension and viscosity
Solution Approach 1:
The patent introduces a specific compound (Formula I) as an intermediary substance that mediates between the conflicting requirements of releasability and ink jet ejection. This compound contains both hydrophilic groups (for releasability) and hydrophobic groups (for maintaining surface tension and viscosity suitable for ink jet ejection), acting as a bridge between the two opposing functional requirements.
Solution Approach 2:
The compound of Formula I exhibits local quality by having different functional groups with opposite properties within the same molecule - hydrophilic groups that provide releasability and hydrophobic groups that maintain surface tension. This allows different parts of the molecule to satisfy different functional requirements simultaneously.
2Ease of operation
If surface tension is reduced to improve mold separation, then releasability increases, but ink jet ejection precision decreases
Solution Approach 1:
The compound of Formula I exhibits local quality by having different functional groups with opposite properties within the same molecule - hydrophilic groups that provide releasability and hydrophobic groups that maintain surface tension. This allows different parts of the molecule to satisfy different functional requirements simultaneously.
Solution Approach 2:
The compound of Formula I acts as a composite molecular structure combining hydrophilic and hydrophobic segments, creating a single substance that delivers both low surface tension (for releasability) and adequate surface tension (for ink jet ejection precision) through its dual-character composition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composition achieves excellent ink jet ejection precision and reduced releasing force, enhancing the quality of the pattern formed and the manufacturing process for semiconductor devices.
Implementation Method 1
a curable composition for optical imprinting for forming a fine pattern using photoirradiation
Data Source
AI summary
A curable composition for optical imprinting which is excellent in ink jet adequacy and releasability, a pattern forming method, a fine pattern, and a method for manufacturing a semiconductor device are provided. The curable composition for optical imprinting contains a polymerizable compound (A), a photopolymerization initiator (B), and a compound (C) expressed by General Formula (I); in General Formula (I), A represents a dihydric to hexahydric polyhydric alcohol residue. p represents 0 to 2, l q represents 1 to 6, p+q represents an integer of 2 to 6, each of m and n independently represents 0 to 20. r expressed by Formula (1) is 6 to 20. Each R independently represents an alkyl group having 1 to 10 carbon atoms, an aryl group, or an acyl group.