Optical Inspection Image Processing for Wavelength Artifact Removal

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Solution Overview

Problem

Existing optical inspection methods struggle to accurately distinguish between image changes caused by wavelength selection portions and surface properties/shape, leading to misidentification of surface defects.

Innovation Solution

A non-transitory storage medium and optical inspection system that includes a processing apparatus capable of generating a wavelength selection portion-removed image by removing the image of the wavelength selection portion from the captured image, using techniques such as Fourier transform and mask processing to separate and identify BRDF changes accurately.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of information

If wavelength selection portion is used to select multiple wavelength spectra, then spectral information is improved, but image quality deteriorates due to inclusion of wavelength selection portion image

Engineering Contradiction:
Improvespectral informationVSAvoidimage quality
Core Design Contradiction:
Loss of informationVSMeasurement precision

Solution Approach 1:

The patent extracts and removes the wavelength selection portion image from the captured image through image processing. By identifying and eliminating this interfering component, the system preserves the spectral information benefit while restoring image quality for accurate surface defect detection.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces an intermediary image processing step that separates the wavelength selection portion image from the object surface image. This intermediary processing layer enables the system to utilize spectral information while preventing the wavelength selection portion from contaminating the inspection results.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Loss of information

If wavelength selection portion image is included in captured image, then spectral information is obtained, but surface defect detection accuracy deteriorates

Engineering Contradiction:
Improvespectral informationVSAvoidsurface defect detection accuracy
Core Design Contradiction:
Loss of informationVSReliability

Solution Approach 1:

The patent extracts and removes the wavelength selection portion image from the captured image through image processing. By identifying and eliminating this interfering component, the system preserves the spectral information benefit while restoring image quality for accurate surface defect detection.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent converts the harmful presence of the wavelength selection portion image into a beneficial feature by using its characteristic pattern to identify and remove it. The same structural element that initially contaminates the image becomes the key to its removal through pattern recognition and image processing.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Data Source

PatentUS12510468B2Non-transitory storage medium, optical inspection system, processing apparatus for optical inspection system, and optical inspection method
Publication Date: 2025.12.30 KK TOSHIBA
  • US12510468B2 patent drawing
  • US12510468B2 patent drawing
  • US12510468B2 patent drawing

AI summary

According to an embodiment, a non-transitory storage medium stores an optical inspection program. The optical inspection program causes a processor to execute generating a wavelength selection portion-removed image by removing, from a captured image of an object surface imaged through a wavelength selection portion configured to select at least two different wavelength spectra from incident light, an image of the wavelength selection portion included in the captured image.