Optical Inspection Apparatus Multi-Spectral Fluorescence Imaging
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Solution Overview
Problem
Current optical inspection methods for electronic devices, such as display panels, face challenges in accurately detecting defects and identifying their causes due to limited information and reliability, particularly in distinguishing between different types of defects based on two-dimensional images alone.
Innovation Solution
An optical inspection apparatus is designed to capture both two-dimensional and fluorescence images from the same input light, utilizing a combination of filters and beam splitters to generate multiple wavelength images, allowing for defect detection and material identification through a fluorescence microscope, and providing vertical direction information to enhance defect classification.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple imaging modules and filters are used to capture both two-dimensional and fluorescence images, then measurement precision and reliability are improved, but device complexity increases
Solution Approach 1:
The patent combines multiple imaging functions (two-dimensional imaging and fluorescence imaging) into a single integrated optical inspection apparatus. The system uses a shared optical path with beam splitters to direct light to different imaging modules simultaneously, merging what would otherwise be separate inspection systems into one unified device, thereby improving measurement precision without proportionally increasing device complexity
Solution Approach 2:
The optical inspection apparatus is designed with multi-functionality to perform both two-dimensional defect detection and fluorescence-based material identification using a single integrated system. The apparatus can switch between different imaging modes and capture multiple types of information from the same sample, making it a universal inspection tool that replaces multiple specialized devices
2Loss of information
If multiple filters with different passbands are used to capture wavelength-divided images, then information completeness is improved, but inspection time increases
Solution Approach 1:
The patent implements continuous multi-wavelength imaging by using multiple filters with different passbands that can capture different wavelength ranges simultaneously or in rapid succession. The system maintains continuous inspection action by efficiently switching between filters and capturing images across the entire spectrum without significant interruptions, ensuring complete defect information is gathered without excessive inspection time
Solution Approach 2:
The optical spectrum is segmented into multiple wavelength bands using filters with different passbands (e.g., blue, green, red, ultraviolet regions). Each filter captures specific wavelength information, and the segmented images are later integrated to form a complete defect analysis. This segmentation allows parallel processing of different wavelength information, reducing total inspection time while maintaining information completeness
3Reliability
If fluorescence imaging is used to identify defect materials, then reliability of defect classification is improved, but device complexity increases
Solution Approach 1:
The patent introduces a fluorescence microscope as an intermediary component that enables material identification through fluorescence imaging. This intermediary system works in conjunction with the main imaging modules, using fluorescence signals as a mediator to provide additional information about defect materials. The fluorescence microscope acts as a specialized subsystem that enhances classification reliability without requiring complete redesign of the entire inspection system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the reliability and speed of defect detection by providing detailed information on defects, enabling accurate identification and classification, and reducing inspection time by obtaining both image types simultaneously.
Implementation Method 1
a first filter (16) having a plurality of passbands; The passbands of the first filter may be discontinuous and may include an ultraviolet region, a blue region, a green region, and a red region
Implementation Method 2
a first beam splitter to reflect a first light that exits from the first filter to transfer the first light to an inspection target; a second beam splitter to split a second light, which is provided by reflecting the first light by the inspection target, into a first split light and a second split light
Implementation Method 3
a fluorescence microscope to generate a fluorescence image from a third light that exits from the second filter; The passband of the second filter may include a wavelength range corresponding to a fluorescence component generated by excitation of the first light caused by the inspection target
Data Source
AI summary
An optical inspection apparatus includes: a first filter having a plurality of passbands; a first beam splitter to reflect a first light that exits from the first filter to transfer the first light to an inspection target; a second beam splitter to split a second light, which is provided by reflecting the first light by the inspection target, into a first split light and a second split light; a second filter to receive the first split light, and having a passband different from the passbands of the first filter; a fluorescence microscope to generate a fluorescence image from a third light that exits from the second filter; and a first imaging module to generate a first image from the second split light.