Optical Inspection Device for Light Emitting Elements
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Solution Overview
Problem
Existing optical inspection methods for light emitting elements are inadequate in minimizing damage to these elements during the inspection process, particularly due to the difficulty in precisely contacting and measuring the optical characteristics of light emitting elements with nanometer to micrometer scales without causing physical or thermal harm.
Innovation Solution
An optical inspection device comprising a first probe and a second probe, with a base frame made of transparent material, including a sensor unit to sense deformation, and a temperature control unit, which allows for precise contact and measurement of light emitting elements on a base substrate while minimizing damage through controlled voltage application and temperature management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a probe contacts the light emitting element for measurement, then measurement precision is improved, but the light emitting element may be damaged due to physical contact or thermal effects
Solution Approach 1:
The patent introduces a base frame made of transparent elastomer as an intermediary between the optical measurement unit and the light emitting elements. This base frame transmits optical signals while providing mechanical cushioning, allowing non-contact optical measurement and preventing direct physical damage to the fragile light emitting elements.
Solution Approach 2:
The base frame is designed with cushioning properties to absorb and distribute mechanical forces before they can reach the light emitting elements. This preemptive cushioning mechanism protects the elements from impact damage during the inspection process while maintaining measurement accuracy.
2Measurement precision
If voltage is applied to the light emitting elements for inspection, then optical characteristics can be measured, but thermal damage may occur
Solution Approach 1:
The inspection system applies voltage to the light emitting elements in periodic or pulsed manner rather than continuous application. This allows the elements to cool down between measurement cycles, preventing cumulative thermal damage while still obtaining sufficient optical characteristic data during the brief activation periods.
Solution Approach 2:
The measurement process is designed to quickly apply voltage, capture optical characteristics, and immediately remove the voltage before excessive heat can accumulate. This rapid measurement approach minimizes thermal exposure time and prevents heat-related damage to the light emitting elements.
3Measurement precision
If the probe contacts the light emitting element with nanometer to micrometer scale, then measurement accuracy is improved, but physical damage risk increases
Solution Approach 1:
The patent replaces direct mechanical contact measurement with non-contact optical measurement methods. Light emitting elements are excited electrically and their optical characteristics are measured remotely through the transparent base frame, eliminating the need for physical probes that could damage the nanometer to micrometer scale structures.
Solution Approach 2:
The transparent elastomer base frame serves as an optical intermediary that allows measurement light to pass through while providing mechanical protection. This enables precise optical measurements without requiring physical contact with the fragile light emitting elements, thus maintaining both measurement accuracy and element integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively inspects the optical characteristics of light emitting elements on a base substrate while reducing damage by using a transparent base frame to cushion impacts and temperature control to prevent heat-related damage, enabling accurate assessment without compromising the integrity of the elements.
Implementation Method 1
The base frame may include a transparent elastomer
Implementation Method 2
a sensor unit configured to sense deformation of the base frame
Implementation Method 3
temperature control unit under the stage
Data Source
AI summary
An optical inspection device comprises an optical measurement unit, a first probe disposed under the optical measurement unit and providing a first voltage, a base frame disposed under the optical measurement unit and spaced apart from the first probe, and a second probe disposed on a surface of the base frame which faces the first probe, providing a second voltage different from the first voltage, and having a plate shape in plan view.


