Optical Inspection Tool Pixel Binning Modes

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Solution Overview

Problem

Low magnification optics in inspection tools result in reduced light collection and image quality, affecting defect detection, especially when high-resolution imaging is not necessary, leading to slower inspection speeds.

Innovation Solution

Implementing pixel binning in optical inspection tools allows for higher magnification imaging at lower resolutions, increasing the signal-to-noise ratio and inspection speed by combining pixels, and synchronizing motion and illumination rates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If low magnification optics are used to increase inspection speed, then inspection speed is improved, but image quality and signal-to-noise ratio deteriorate

Engineering Contradiction:

Improveinspection speedVSAvoidimage quality

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

Multiple pixels are merged into single binned pixels to increase signal-to-noise ratio while maintaining high magnification optics, enabling fast inspection without sacrificing image quality

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The system dynamically adjusts binning configuration based on inspection requirements, allowing flexible switching between high resolution and high speed modes

Inventive Principle:

Principle #15Dynamics

2Measurement precision

If high magnification optics are used to improve image quality, then measurement precision is improved, but inspection speed deteriorates

Engineering Contradiction:

Improveimage qualityVSAvoidinspection speed

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

Adjacent pixels are combined into binned pixels to reduce the total number of pixels processed, thereby increasing inspection speed while maintaining the advantages of high magnification optics

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

Binning is applied selectively to different regions of the detector array, allowing high resolution where needed and high speed where resolution is less critical

Inventive Principle:

Principle #3Local quality

3Productivity

If low magnification optics are used to increase inspection speed, then inspection speed is improved, but light collection and signal-to-noise ratio deteriorate

Engineering Contradiction:

Improveinspection speedVSAvoidlight collection

Core Design Contradiction:

ProductivityVSIllumination intensity

Solution Approach 1:

Multiple pixels are combined into binned pixels, increasing the effective light collection area per pixel and improving signal-to-noise ratio while using high magnification optics for fast inspection

Inventive Principle:

Principle #5Merging (Combining)

Data Source

PatentUS8098372B2Optical inspection tool featuring multiple speed modes

Publication Date: 2012.01.17 APPLIED MATERIALS SOUTH EAST ASIA PTE LTD

AI summary

An optical inspection tool can feature a double-speed and other modes whereby the inspection rate is increased by using pixel binning. For instance, the tool may include an array of pixels provided by one or more detectors. Some or all of the pixels in one or more of the detectors may be binned according to inspection requirements. Based on the reduction in effective pixels due to the binning, in some embodiments, the rate of imaging and scanning rate of the wafer (or other object) can be increased. Different portions of the array may be binned differently to provide for increased throughput during inspections; for instance, the binning arrangement across an array can be correlated to the features that will be imaged using the array.