Optical Device Isolation Trenches for Stray Light Reduction
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Solution Overview
Problem
Optical devices with active components like light sensors or modulators face performance degradation due to stray light, thermal, and electrical interference from other components on the device, necessitating effective isolation methods.
Innovation Solution
The integration of isolation trenches into the optical device's active medium, which extend into the slab regions and are spaced apart from the ridge, forming a perimeter around the active component to prevent stray light, thermal, and electrical interference, while also being formed using existing waveguide etches for precise alignment and minimal added complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If isolation trenches are added to prevent stray light and thermal interference, then component performance is improved, but device complexity increases
Solution Approach 1:
The isolation trenches are formed by merging the device waveguide etch and component waveguide etch processes. By aligning the etch patterns so that trenches from both etches combine to form complete isolation structures, the patent reduces the number of separate fabrication steps while achieving the desired isolation效果.
Solution Approach 2:
The etch processes serve multiple functions: they define the waveguide paths and simultaneously create the isolation trenches. This multi-functionality allows the same fabrication steps to achieve both waveguide formation and component isolation, eliminating the need for dedicated isolation trench etching steps.
2Object-affected harmful factors
If isolation trenches are formed by separate etching process, then isolation effectiveness is improved, but manufacturing complexity increases
Solution Approach 1:
The patent combines the isolation trench formation with the existing device and component waveguide etch processes. The trenches are created as a byproduct of these necessary waveguide-defining etches, eliminating the need for separate isolation trench etching steps.
Solution Approach 2:
The waveguide etch processes automatically create the isolation trenches as part of their own function. The etch patterns are designed so that the trenches form self-aligned structures that both define the waveguide paths and provide the necessary isolation between components.
Data Source
AI summary
The optical device includes an active component on a base. The active component is a light sensor and/or a light modulator. The active component including an active medium that includes a ridge and slab regions. The ridge extends upwards from the base and is positioned between the slab regions. The ridge defines a portion of a waveguide on the base. One or more isolation trenches each extends into the slab regions of the active medium and is at least partially spaced apart from the ridge of the active medium.