Optical Isolator Lift Assembly With Replaceable UHV Motor Module

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing motor assemblies for lifting devices in ultra-high vacuum environments contaminate the vacuum chamber and require costly downtime for replacement, as they cannot be easily integrated with existing inspection systems and maintain cleanliness.

Innovation Solution

A detachable motor assembly system with a stepper motor and gearhead, housed separately from the lifting device, allows for easy replacement without disturbing the vacuum environment, using a coupling mechanism and vacuum seals to prevent contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the motor assembly is disposed inside the lifting device enclosure in the ultra-high vacuum chamber, then the lifting device can be compact and integrated, but the motor assembly cannot be replaced without disassembling the lifting device and connected optics, leading to costly downtime

Engineering Contradiction:
Improveintegration of motor assembly with lifting deviceVSAvoidreplaceability of motor assembly
Core Design Contradiction:
Device complexityVSEase of repair

Solution Approach 1:

The motor assembly is segmented from the lifting device enclosure, with each component (motor assembly, lifting device, optical component) housed in separate detachable units. This allows the motor assembly to be replaced independently without disassembling the entire lifting device or disturbing the optical component, resolving the contradiction between integration and replaceability.

Inventive Principle:
Principle #1Segmentation

2Object-affected harmful factors

If the motor assembly is disposed outside the vacuum chamber at atmosphere, then the ultra-high vacuum environment is protected from contamination, but expensive dynamic vacuum feedthrough devices and vacuum bellows are required to couple the motor to the lifting device

Engineering Contradiction:
Improvecontamination of vacuum chamberVSAvoidvacuum feedthrough and bellows requirements
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The motor assembly is extracted from the ultra-high vacuum chamber and placed in a separate motor housing that interfaces with the vacuum chamber through a simple vacuum seal. This eliminates the need for complex dynamic vacuum feedthrough devices and bellows, while still protecting the vacuum environment from motor-generated contaminants.

Inventive Principle:
Principle #2Taking out (Extraction)

3Object-affected harmful factors

If the motor assembly is disposed outside the vacuum chamber, then contamination is avoided, but the lifting device and optical component must be disconnected from all three lifting devices in case of motor failure, as two lifting devices cannot carry the imbalanced load

Engineering Contradiction:
Improvecontamination of vacuum chamberVSAvoiddowntime for system disconnection and reconfiguration
Core Design Contradiction:
Object-affected harmful factorsVSLoss of time

Solution Approach 1:

The system is segmented into independent modular units (motor assembly, lifting device, optical component) that can be serviced independently. The motor assembly can be replaced without disconnecting the lifting device from the optical component or requiring reconfiguration of the multi-lifting device system, eliminating downtime caused by system disconnection.

Inventive Principle:
Principle #1Segmentation

4Ease of operation

If existing motor assemblies are used in the ultra-high vacuum environment, then the lifting function is achieved, but particles or hydrocarbon contaminants are produced that attach to other components and decrease inspection accuracy

Engineering Contradiction:
Improvelifting functionVSAvoidcontamination from motor operation
Core Design Contradiction:
Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The motor assembly is extracted from the ultra-high vacuum environment and placed in a separate atmospheric environment. A vacuum seal at the interface prevents motor-generated particles and hydrocarbon contaminants from entering the vacuum chamber, while the lifting function is maintained through the sealed connection.

Inventive Principle:
Principle #2Taking out (Extraction)

Data Source

PatentUS12444643B2Method and apparatus for positioning optical isolator assembly with replaceable motor assembly
Publication Date: 2025.10.14 KLA CORP
  • US12444643B2 patent drawing
  • US12444643B2 patent drawing
  • US12444643B2 patent drawing

AI summary

An apparatus includes a lifting device and a motor assembly. The lifting device is disposed in a lifting device housing and is configured to adjust a vertical position of an optical component connected to the lifting device. The motor assembly is disposed in a motor housing and is configured to drive the lifting device to adjust the vertical position of the optical component. The lifting device housing, the motor housing, and the optical component are disposed in an ultra-high vacuum chamber of an enclosure. In the case of motor failure, the motor housing can be disconnected from the lifting device housing, and the motor assembly can be decoupled from the lifting device, such that the motor assembly can be replaced.