Optical Device Junction-Inhibiting Film Light Density Control
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Solution Overview
Problem
Conventional optical devices face issues with light output reduction due to contamination and fusion when high-intensity light is used, leading to increased transmission loss and reliability concerns, especially with short-wavelength light sources.
Innovation Solution
An optical device with a junction-inhibiting film on the abutment face between the optical fiber and transparent member, maintaining light density at 4464 W/mm2 or less, and setting the incident terminal face light density to 8 W/mm2 or less to prevent contamination and fusion, thereby reducing light output reduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high light output density is used in the abutment face, then light transmission efficiency is improved, but contamination and fusion occur reducing reliability
Solution Approach 1:
A junction-inhibiting film is introduced as an intermediary layer on the abutment face between the optical fiber and transparent member. This film acts as a mediator that prevents direct contact and fusion between the optical components while maintaining optical transmission, thereby resolving the contradiction between high light output efficiency and connection stability
Solution Approach 2:
The refractive index of the junction-inhibiting film is specifically designed to be between 1.3 and 1.6, which is lower than the refractive index of the optical fiber core. This parameter change optimizes light transmission while preventing unwanted optical interactions that could lead to contamination and fusion, maintaining both efficiency and reliability
2Power
If light density on the incident terminal face is high, then light output power is improved, but contamination occurs reducing light output
Solution Approach 1:
The junction-inhibiting film is applied in advance to the abutment face before the optical components are assembled. This preliminary protective action prevents contamination from occurring during operation, allowing the system to maintain high light output power without the detrimental effects of contamination
Solution Approach 2:
The junction-inhibiting film serves as a protective intermediary layer that shields the incident terminal face from contamination while allowing high light density to pass through, thus maintaining high light output power without suffering from contamination-related degradation
3Strength
If fusion occurs between coreless fiber and transparent member, then connection is formed, but connection loss increases due to peeling
Solution Approach 1:
The junction-inhibiting film acts as a protective intermediary layer between the coreless fiber and transparent member, preventing direct fusion while maintaining mechanical and optical connection. This eliminates the peeling issue that occurs with direct fusion, thereby reducing connection loss and improving reliability
Solution Approach 2:
By controlling the refractive index of the junction-inhibiting film to be between 1.3 and 1.6, the optical properties are optimized to minimize reflection and transmission loss at the interfaces, while the physical presence of the film prevents fusion and subsequent peeling, resolving the contradiction between connection strength and connection loss
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses light output reduction caused by contamination and fusion, enhancing the reliability and stability of the optical device by maintaining high light transmission and preventing accidental failures.
Implementation Method 1
a junction-inhibiting film is provided on an abutment face between the optical fiber and transparent member, and light density in the abutment face is 4464 W/mm2 or less
Implementation Method 2
a light source which outputs light of predetermined wavelength, a first optical member through which the light of the predetermined wavelength passes, and a second optical member which abuts against the first optical member and through which the light of the predetermined wavelength passes
Data Source
AI summary
The present invention provides an optical device and an exposure apparatus capable of suppressing a reduction in light output. The optical device of the present invention includes a laser light source which emits laser light having a short wavelength (e.g., 160 to 500 nm), a lens, a transparent member and an optical fiber provided with a junction-inhibiting film. The optical device is configured such that light density of abutment faces between the transparent member and the optical fiber formed with the junction-inhibiting film is 4464 W/mm2 or less, thereby suppressing a reduction in light output which may be caused by fusion.