Optical Measurement Device Frame Deformation Correction
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Solution Overview
Problem
Current optical measurement devices for semiconductor manufacturing face challenges due to deformation of bridge-like structures affecting measurement accuracy and prolonged substrate warming times, which reduce production efficiency.
Innovation Solution
An optical measurement device with a deformation measurement device and correction module to correct the position of the substrate carrier and optical detection device based on frame deformation, and a substrate temperature control unit to rapidly reach target temperature.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a bridge-like structure is used for the optical detection platform frame, then the device complexity is reduced and ease of manufacture is improved, but the frame deforms as the substrate carrier moves, affecting measurement precision
Solution Approach 1:
The patent applies preliminary action by measuring the frame deformation in advance using the deformation measurement device (interferometers) and pre-calculating correction values. The correction module then applies these pre-computed corrections to the substrate carrier position, eliminating the need for real-time complex calculations and enabling efficient compensation for bridge-like structure deformation.
Solution Approach 2:
The patent implements feedback by using the deformation measurement device to continuously monitor frame deformation and feeding this information back to the correction module. The correction module then adjusts the substrate carrier position based on this feedback, creating a closed-loop system that maintains measurement precision despite bridge-like structure deformation.
2Stability of the object's composition
If substrates are kept at factory temperature (23±1 degrees) before measurement, then temperature stability is improved, but the substrates need to be put aside for a long time, reducing productivity
Solution Approach 1:
The patent applies preliminary action by implementing a substrate temperature control unit that pre-heats or pre-cools substrates to the target measurement temperature before they enter the measurement process. This eliminates the need for long waiting periods and allows substrates to be measured immediately after temperature adjustment, significantly improving productivity while maintaining temperature stability.
3Area of stationary object
If the substrate carrier moves to different positions for measurement, then comprehensive measurement coverage is improved, but frame deformation varies at different positions, worsening measurement precision
Solution Approach 1:
The patent applies preliminary action by measuring and storing frame deformation characteristics at various substrate carrier positions in advance. The correction module then retrieves the appropriate correction values based on the current position, enabling accurate compensation across the entire measurement range without requiring real-time deformation analysis.
Solution Approach 2:
The patent implements parameter changes by dynamically adjusting the correction values based on the substrate carrier position. As the carrier moves to different positions, the system changes the correction parameters to match the local frame deformation characteristics, maintaining measurement precision across the full measurement coverage area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution improves measurement accuracy by compensating for frame deformation and reduces substrate warming time, enhancing production efficiency by aligning detection devices with marks and quickly stabilizing substrate temperature.
Implementation Method 1
a deformation measurement device for measuring magnitude of deformation of an optical detection platform frame
Implementation Method 2
a measurement interferometer is disposed in each moving direction of the unit for measurement control
Data Source
AI summary
An optical measurement device includes: a deformation measurement device for measuring magnitude of deformation of an optical detection platform frame, and a correction module for correcting the position of a substrate carrier and/or the position of an optical detection device according to the magnitude of deformation of the optical detection platform frame, so as to eliminate an error in measurement of mark positions due to deformation of the frame. An optical measurement method is also disclosed.