Optical Measuring Device Dual Observation Switching
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Solution Overview
Problem
Conventional optical measuring devices face difficulties in observing wiring covered with silicon or resin films, as they struggle to penetrate these materials with visible light, and specialized observations like near-infrared or fluorescent observations cannot perform visual observations simultaneously.
Innovation Solution
An optical measuring device is designed with both visual and special observation sections, featuring a white light source, multiple tube lenses for magnification adjustment, and a lens switching mechanism, along with a special light source and filters for near-infrared or fluorescent observations, allowing for seamless switching between visual and specialized imaging modes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional optical measuring device uses white light for visual observation, then visual observation capability is maintained, but it cannot penetrate silicon or resin films to observe underlying wiring
Solution Approach 1:
The optical measuring device is designed to perform multiple observation functions (visual observation and near-infrared observation) using a unified system structure. The device can switch between white light source for visual observation and near-infrared light source for penetrating silicon/resin films, making it universally applicable to different observation needs without requiring separate devices.
Solution Approach 2:
The invention changes the wavelength parameter of the light source to solve the penetration problem. By switching from visible light (white light) to near-infrared light with longer wavelengths, the system can penetrate materials like silicon and resin films that are opaque to visible light, thereby enabling observation of underlying wiring structures.
2Adaptability or versatility
If a special light source is used for near-infrared observation, then penetration through silicon and films is achieved, but visual observation capability is lost
Solution Approach 1:
The optical measuring device incorporates a switching mechanism that dynamically changes the light source and optical path based on the required observation mode. The system can switch between white light source and near-infrared light source, and between different optical paths (visual observation path and near-infrared observation path), enabling adaptive operation for different observation needs.
Solution Approach 2:
The optical system is segmented into separate visual observation section and near-infrared observation section. Each section has its dedicated light source and optical path, allowing independent optimization of each function while maintaining the ability to switch between them through a unified control system.
3Adaptability or versatility
If separate optical paths are provided for visual and near-infrared observations, then both observation types can be performed, but device complexity increases
Solution Approach 1:
The invention merges the visual observation system and near-infrared observation system into a single integrated optical measuring device. Both observation paths share common components where possible (such as the objective lens, stage, and detection system), while having separate specialized components (light sources and filters). This merging reduces overall device complexity compared to having completely separate systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables simultaneous visual and specialized observations, such as near-infrared and fluorescent imaging, by using a combination of white light and specialized light sources with adjustable magnification and filtering, effectively inspecting IC wafers and biological tissues.
Implementation Method 1
a white light source which emits white light; an objective lens arranged between the white light source and the measurement object, through which lens the white light emitted from the white light source and return light from the measurement object transmit
Implementation Method 2
a plurality of tube lenses which change a magnification of the return light passing through the objective lens to a predetermined magnification
Implementation Method 3
a special light source which emits special light; and a second objective lens arranged between the special light source and the measurement object, through which lens the special light emitted from the special light source and return light from the measurement object transmit
Data Source
AI summary
In an optical measuring device, the visual observation section includes: a white light source which emits white light; a first objective lens arranged between the white light source and measurement object, through which the white light emitted from the white light source and return light from the measurement object transmit; a plurality of tube lenses which change a magnification of the return light passing through the first objective lens to a predetermined magnification; and a lens switching mechanism which can selectively switch the tube lenses so as to select one of the tube lenses to be arranged on the return light, and the special observation section includes: a special light source which emits special light; and a second objective lens arranged between the special light source and measurement object, through which the special light emitted from the special light source and return light from the measurement object transmit.