Optical Characteristic Measuring Apparatus Multi-Distance Spectral Analysis
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Solution Overview
Problem
Conventional optical characteristic measuring methods require focusing, which increases measurement time and apparatus complexity, making it difficult to efficiently measure optical characteristics like film thickness.
Innovation Solution
An optical characteristic measuring apparatus and method that collect and spectrally disperse detection light multiple times with varying optical distances, allowing the analysis unit to select the most relevant data based on intensity for accurate optical characteristic measurement without the need for focusing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If focusing mechanism is provided to improve measurement precision, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent extracts the focusing mechanism from the optical characteristic measurement system, separating it into an independent observation system. The measurement system uses a simple optical path without focusing components, while the observation system (camera and light source) handles focusing independently, thus reducing measurement device complexity while maintaining precision through multi-distance data acquisition and analysis
Solution Approach 2:
The patent segments the measurement and observation functions into separate systems. The measurement system acquires spectral data without focusing, while the observation system with camera and light source performs focusing and provides guidance. This segmentation allows the measurement system to remain simple while the observation system handles the complexity of focusing
2Measurement precision
If focusing process is performed to improve measurement precision, then measurement precision is improved, but measurement time increases
Solution Approach 1:
The patent uses the observation system to perform preliminary focusing action before measurement, or performs focusing independently of the measurement process. The camera captures reflected light images to determine optimal focus position, and this focusing information is used to guide subsequent measurements, eliminating the need to perform focusing during the actual optical characteristic measurement
Solution Approach 2:
The observation system with camera and light source performs self-service focusing, automatically determining the optimal optical distance without requiring manual adjustment or interfering with the measurement process. The system uses intensity information from captured images to automatically identify focus conditions
3Measurement precision
If multiple detection data with different optical distances are collected to improve measurement accuracy, then measurement accuracy is improved, but data processing complexity increases
Solution Approach 1:
The patent implements feedback by using intensity information from detection data to determine which optical distance provides the best measurement conditions. The analysis unit receives multiple spectra, evaluates their intensity characteristics, and uses this feedback to select or weight data appropriately, improving accuracy through intelligent data selection rather than processing all data equally
Solution Approach 2:
The patent changes the parameter of optical distance by collecting detection data at multiple different optical distances. The analysis unit then evaluates intensity characteristics across these different distances and selects the optimal data for measurement, effectively using parameter variation to improve accuracy while managing data processing through intelligent selection
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables faster and more accurate measurement of optical characteristics, such as film thickness, by specifying the appropriate detection data from multiple spectra, reducing the complexity of the measurement process and apparatus configuration.
Implementation Method 1
a spectrum of light reflected by the sample to be measured is measured with a spectrometer
Implementation Method 2
The detector spectrally disperses the detection light in plural times to generate plural pieces of detection data, the plural pieces of detection data indicating their respective spectra of detection light
Data Source
AI summary
An optical characteristic measuring apparatus includes an optical system, a detector, and an analysis unit. The optical system collects detection light incident from a sample. The detector spectrally disperses the detection light in plural times to generate plural pieces of detection data, the plural pieces of detection data indicating their respective spectra of detection light incident from the sample to the optical system with an optical distance between the sample and the optical system being different from each other. The analysis unit analyzes the spectrum indicated by the detection data to measure a predetermined optical characteristic of the sample. The analysis unit specifies a piece of the detection data to be used for measuring the optical characteristic based on intensity of the detection light in the plural pieces of detection data, and measures the optical characteristic based on the specified piece of the detection data.