Optical Member Holding Apparatus for EUV Exposure Alignment
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Solution Overview
Problem
In EUV exposure apparatuses, the need arises for an optical member-holding technique that allows for easy adjustment of relative positions of optical members from different optical systems sharing a common barrel without obstructing the EUV light beam and ensuring precise alignment for high-resolution image transfer.
Innovation Solution
An optical member-holding apparatus with a barrel unit and holding portions for each optical member, supported by a base and adjusted using a dual mechanism to precisely position and orient the optical members within the barrel, ensuring non-interference with the EUV light beam and facilitating alignment between the illumination and projection optical systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If optical members from different optical systems are arranged in a common barrel, then space utilization is improved, but the risk of shielding or intercepting the EUV light beam increases
Solution Approach 1:
The common barrel is divided into multiple barrel units, each accommodating specific optical members. This segmentation allows independent positioning and adjustment of each optical member while maintaining overall space efficiency, preventing interference between members from different optical systems
Solution Approach 2:
Adjusting mechanisms are introduced as intermediaries between the optical members and the barrel structure. These mechanisms enable precise control of optical member positions and postures, ensuring that members from different optical systems do not shield or intercept the EUV light beam while still utilizing the common barrel space
2Productivity
If optical members are held in a common barrel, then assembly efficiency is improved, but the complexity of adjusting relative positions increases
Solution Approach 1:
The holding structure is segmented into multiple barrel units with individual holding mechanisms. Each barrel unit can be independently assembled and adjusted, simplifying the overall adjustment process while maintaining assembly efficiency. The segmentation allows for modular assembly where each unit can be prepared separately before integration
Solution Approach 2:
Adjusting mechanisms are incorporated into each barrel unit to dynamically control the position and posture of optical members. These mechanisms provide real-time adjustability during assembly and operation, enabling precise relative positioning without requiring complex pre-adjustment procedures, thus maintaining high assembly efficiency while managing adjustment complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy adjustment and precise alignment of optical members within the EUV exposure apparatus, ensuring high-resolution image transfer and efficient assembly of the EUV exposure apparatus, particularly in the EUV exposure apparatus where all components are reflecting members.
Implementation Method 1
an adjusting mechanism (13D,13M) arranged to adjust a position of the first holding portion (32) with respect to the support base (25C,31) and a position of the second holding portion (21) with respect to the support base (25C,31)
Implementation Method 2
all components of the illumination optical system and the projection optical system are constructed of reflecting optical elements or catoptric optical elements (mirrors)
Data Source
Figure 1
Figure 2
Figure 3(A)~3(B)
AI summary
There is provided is an optical member-holding apparatus which can hold a plurality of optical members of two different optical systems, even when the optical members exist in a common barrel in a mixed manner, such that the relative positions between the optical members can be easily adjusted; and which holds a mirror (M4) in a projection optical system and a mirror (M) in an illumination optical system and includes a barrel unit (12C), an inner ring (21) holding the mirror (M4), a holding member (32) holding the mirror (M), a support plate (25C, 31) attached to the barrel unit (12C), and a holding-supporting mechanism (13D, 13M) attached to the support plate (25C, 31) and adjusting the relative position of the mirror (M4) to the mirror (M).