Optical Module Alignment in Microlithography Systems
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Solution Overview
Problem
The complexity of adjusting projection exposure systems for microlithography at customer premises is high due to deviations in optical characteristics of separately produced optical modules, requiring complex optimization of optical elements to match desired specifications.
Innovation Solution
A method and apparatus that utilize an irradiation system, reference component, detection element, and adjustment device to measure and adjust the position of optical modules within a measuring apparatus, establishing position parameters to align the optical module's exit beam with a predetermined position, thereby simplifying the alignment process and reducing the need for further adjustments in the projection exposure system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If optical modules are produced separately by the manufacturer and fitted at customer premises, then manufacturing flexibility and ease of installation are improved, but optical characteristic deviations increase requiring complex adjustment
Solution Approach 1:
The patent applies preliminary action by measuring and determining the actual optical characteristics of the optical module before it is installed in the projection exposure system. The measuring apparatus captures beam position data and calculates position parameters in advance, so that when the module is installed, the parameters are already optimized, reducing on-site adjustment complexity.
Solution Approach 2:
The patent introduces a measuring apparatus as an intermediary between the optical module manufacturer and the customer's projection exposure system. This intermediary device measures the actual optical characteristics and provides position parameters that bridge the gap between separately manufactured modules and the system's optical path requirements.
2Manufacturing precision
If optical elements are adjusted to match target specifications, then optical quality is improved, but adjustment complexity and time increase
Solution Approach 1:
The patent replaces complex mechanical adjustment processes with an optical measurement and calculation system. Instead of manually adjusting optical elements to achieve desired characteristics, the system uses a measuring apparatus to detect beam positions and computationally determines position parameters, substituting mechanical trial-and-error adjustment with optical measurement and mathematical calculation.
Solution Approach 2:
The patent creates a virtual model of the optical module's actual characteristics through measurement. The measuring apparatus captures the actual beam positions and optical path deviations, creating a digital representation that is used to calculate corrected position parameters, rather than directly manipulating the physical optical elements.
3Adaptability or versatility
If optical modules are separately produced, then manufacturing adaptability is improved, but optical path deviations from desired course increase
Solution Approach 1:
The patent implements feedback by measuring the actual optical characteristics of separately produced modules and using this information to determine corrected position parameters. The measuring apparatus provides feedback on beam position deviations, and this feedback is used to calculate the specific adjustments needed for each individual module to compensate for manufacturing variations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the complexity of adjusting projection exposure systems by aligning the optical module's actual characteristics with the system's optical path, improving optical properties and minimizing the need for fine adjustments, thus enhancing the system's performance and ease of installation.
Implementation Method 1
providing the measuring apparatus with an irradiation system for irradiating the optical module with electromagnetic radiation
Implementation Method 2
a detection element defining a detection surface... measuring a position of the exit beam in relation to the detection surface
Data Source
AI summary
A method for arranging an optical module in a measuring apparatus includes: providing the measuring apparatus with an irradiation system for irradiating the optical module with electromagnetic radiation, a reference component, and a detection element defining a detection surface, the detection element being disposed in a defined position in relation to the reference component, disposing the optical module in the measuring apparatus such that the radiation emitted by the irradiation system passes through the optical module and impinges onto the detection surface as an exit beam, measuring a position of the exit beam in relation to the detection surface, adjusting the position of the optical module within the measuring apparatus such that the position of the exit beam in relation to the detection surface is brought to correspond to a predetermined position, and establishing position parameters defining the position of the optical module in relation to the reference component.