Optical Module Elastic Damper Vibration Isolation

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Solution Overview

Problem

Conventional optical modules in semiconductor fabrication suffer from poor overlay accuracy due to instability in alignment systems, where optical components either displace due to high freedom of movement or adhesive failure caused by thermal and aging issues, leading to unbalanced or misplaced components.

Innovation Solution

An optical module structure featuring a tubular holder with an elastic damper layer that supports optical components, absorbing vibrations and maintaining their position without adhesives, ensuring the weight is borne by the holder rather than the damper layer, thereby stabilizing the components and enhancing alignment accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If optical components are fixed with adhesive, then ease of assembly is improved, but reliability deteriorates due to thermal and aging issues causing adhesive failure

Engineering Contradiction:

Improveease of assemblyVSAvoidadhesive stability

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The patent replaces the adhesive-based mechanical fixation system with a elastic damper system that uses elastic deformation and friction to hold optical components. The elastic damper layer deforms elastically under the weight of optical components and provides continuous contact pressure to maintain positioning, eliminating the need for adhesives that fail under thermal and aging conditions.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fixation mechanism from chemical bonding (adhesive) to physical elastic deformation. The elastic damper layer's material properties and deformation characteristics are optimized to provide stable fixation under varying thermal and mechanical conditions, transforming the fixation principle from chemical to physical-elastic.

Inventive Principle:

Principle #35Parameter changes

2Ease of operation

If optical components are freely positioned, then ease of operation is improved, but manufacturing precision deteriorates due to displacement from vibration and gravity

Engineering Contradiction:

Improvepositioning flexibilityVSAvoidoverlay accuracy

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The patent introduces a dynamic elastic damper system that adapts to the weight and position of optical components. The elastic damper layer continuously adjusts its deformation to maintain optimal contact pressure and positioning, providing dynamic stabilization that prevents displacement from vibration and gravity while maintaining operational flexibility.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The elastic damper layer is pre-installed with optimized thickness and material properties to cushion and absorb vibrations and gravitational effects before they can cause displacement. This beforehand cushioning prevents positioning errors from occurring in the first place, ensuring manufacturing precision is maintained.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

3Device complexity

If adhesive is used to fix optical components, then device complexity is reduced, but reliability deteriorates due to thermal expansion and contraction

Engineering Contradiction:

Improvefixation structure simplicityVSAvoidthermal stability

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The patent replaces the adhesive-based fixation system with an elastic damper system that uses elastic deformation and friction to hold optical components. The elastic damper layer deforms elastically under the weight of optical components and provides continuous contact pressure to maintain positioning, eliminating the need for adhesives that fail under thermal and aging conditions.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances overlay accuracy and improves the yield of integrated circuit devices by preventing displacement and maintaining component balance, even under thermal expansion and contraction.

Implementation Method 1

an elastic damper layer that supports optical components, absorbing vibrations and maintaining their position

Methodology Applied

Scientific EffectElasticity: Elasticity

Data Source

PatentUS20210088744A1Optical module structure

Publication Date: 2021.03.25 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

An optical module structure is provided. The optical module structure includes a holder, an elastic damper layer, and an optical component. The holder has an inner surface; the elastic damper layer is on the inner surface and has a trench at a first surface of the elastic damper layer; and the optical component is engaged with the elastic damper layer through the trench. Also, an optical system is provided. The optical system includes a light source, an, and a reflector, wherein a plurality of optical components in the optical module are arranged along a direction perpendicular to a direction of gravity.