Optical Module Dual SLM Polarization Separation

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Solution Overview

Problem

Current light irradiation apparatuses, such as laser machining apparatuses, are limited in providing a wide variety of irradiation forms as they primarily utilize a single spatial light modulator for phase modulation, restricting the ability to simultaneously irradiate targets with multiple beams of light subjected to different modulations for varied irradiation conditions like gathering depths or pulse widths.

Innovation Solution

An optical module comprising a polarization beam splitter, nonreciprocal polarization elements, and reflective spatial light modulators (SLMs) to separate and modulate p-polarization and s-polarization components, allowing for the combination of modulation light with different properties, such as varying gathering depths or irradiation conditions, and enhancing light use efficiency by utilizing both polarization components effectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a single spatial light modulator is used for phase modulation, then the device complexity is reduced, but the adaptability of irradiation forms is limited

Engineering Contradiction:
Improvevariety of irradiation formsVSAvoidoptical system configuration
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent divides the optical system into two separate modulation paths, each with its own spatial light modulator (SLM1 and SLM2). This segmentation allows independent control and modulation of light beams, enabling diverse irradiation forms such as simultaneous multi-beam irradiation with different focusing depths or pulse widths, thereby resolving the contradiction between adaptability and complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent creates a multi-functional optical system where multiple SLMs can perform different modulation functions simultaneously. The system can irradiate targets with multiple beams subjected to various modulations (phase, amplitude, focusing depth, pulse width), making the system universally applicable to diverse irradiation requirements while maintaining manageable complexity through modular architecture

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Use of energy by moving object

If both p-polarization and s-polarization components are utilized, then light use efficiency is improved, but device complexity increases

Engineering Contradiction:
Improvelight use efficiencyVSAvoidoptical system configuration
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The patent uses a polarization beam splitter to segment the incident light into p-polarization and s-polarization components, directing each component to separate optical paths with dedicated SLMs. This segmentation enables full utilization of both polarization components, improving light use efficiency while the modular path design keeps the overall system complexity manageable

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The polarization beam splitter acts as an intermediary device that separates and directs different polarization components to appropriate modulation paths. This intermediary component enables efficient use of both polarization states without requiring complex direct manipulation, resolving the contradiction between light efficiency and system complexity

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables a wider variety of irradiation forms by allowing independent modulation and combination of p-polarization and s-polarization components, increasing light use efficiency and reducing speckles, while simplifying the optical system configuration.

Implementation Method 1

a polarization beam splitter including a light splitting surface for reflecting an s-polarization component included in the irradiation light and transmitting a p-polarization component

Methodology Applied
Scientific EffectPolarization beam splitting: Polarisation

Implementation Method 2

a first polarization element having nonreciprocal optical activity to rotate a polarization plane

Methodology Applied
Scientific EffectNonreciprocal optical activity: Faraday Effect

Implementation Method 3

a first reflective SLM for modulating the first polarization component passing through the first polarization element to generate first modulation light

Methodology Applied
Scientific EffectPhase modulation: Phase Modulation

Data Source

PatentUS9784980B2Optical module and light exposure device
Publication Date: 2017.10.10 HAMAMATSU PHOTONICS KK
  • US9784980B2 patent drawing
  • US9784980B2 patent drawing
  • US9784980B2 patent drawing

AI summary

An optical module (1A) includes a polarization beam splitter (10A), polarization elements (20 and 40) having nonreciprocal optical activity and respectively arranged on an optical path of a first polarization component (L2) transmitted through a light splitting surface (11) in irradiation light (L1) and an optical path of a second polarization component (L4) reflected in the light splitting surface (11), a first reflective SLM (30) that modulates and reflects a first polarization component (L2) passing through the first polarization element (20), and a second reflective SLM (50) that modulates and reflects the second polarization component (L4) passing through the second polarization element (40). First modulation light (L3) passing through the polarization element (20) again and then reflected by the light splitting surface (11) and second modulation light (L5) passing through the polarization element (40) again and then transmitted through the light splitting surface (11) are combined with each other.