Optical Module Movable Mirror Segmentation for Angular Alignment
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Solution Overview
Problem
Optical modules with interference optical systems on silicon-on-insulator (SOI) substries face limitations in increasing the size of movable mirror surfaces for improved sensitivity, and there is a need to easily measure angular deviations of these mirrors.
Innovation Solution
An optical module design featuring a base with a mounting region and a driving region for a movable mirror, a fixed mirror, and a beam splitter unit, where the movable mirror's surface intersects the base, allowing for increased size and easy measurement of angular deviations relative to a fixed mirror.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If deep cutting with respect to an SOI substrate is performed to increase the size of a movable mirror surface, then the sensitivity of an FTIR is improved, but the degree of completion of deep cutting is limited to approximately 500 μm at the maximum
Solution Approach 1:
The invention divides the optical system into two separate components: an SOI substrate containing the interference optical system, and a separately formed movable mirror. This segmentation allows the movable mirror to be manufactured independently with a larger surface area than what can be achieved through deep cutting of the SOI substrate, while the SOI substrate maintains its manufacturing advantages.
Solution Approach 2:
The invention introduces a base as an intermediary component that mounts both the SOI substrate and the separately formed movable mirror. This base enables the integration of two independently optimized components, allowing the movable mirror to achieve larger surface area while maintaining precise angular alignment through the base's mounting structure.
2Area of moving object
If a separately formed movable mirror is mounted in a base to increase mirror surface size, then the sensitivity is improved, but it becomes necessary to measure whether or not an angular deviation of the mirror surface is kept within a predetermined range
Solution Approach 1:
The base serves as an intermediary mounting structure that provides reference surfaces for both the SOI substrate and the movable mirror. By directing both mirror surfaces toward one side in the first direction, the base creates a common reference frame that simplifies angular deviation measurement, as deviations can be measured relative to this established orientation rather than requiring complex absolute measurements.
Solution Approach 2:
Instead of measuring angular deviation from an absolute reference, the invention inverts the measurement approach by using the fixed mirror's surface orientation as the reference and measuring the movable mirror's deviation relative to it. This relative measurement approach simplifies the measurement process and reduces the complexity of establishing absolute angular references.
3Difficulty of detecting and measuring
If the mirror surface of the movable mirror and the mirror surface of the first fixed mirror are directed to one side in the first direction, then angular deviation measurement is simplified, but the structural configuration becomes more specific
Solution Approach 1:
The base is designed with multi-functionality: it serves as the mounting structure for both the SOI substrate and the movable mirror, provides the reference frame for angular alignment, and establishes the common orientation direction for both mirror surfaces. This universal mounting structure simplifies the overall system configuration despite the specific directional requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables larger movable mirror surfaces while ensuring angular deviations are within predetermined ranges, facilitating accurate alignment and interference light measurement.
Implementation Method 1
a beam splitter unit which constitutes a first interference optical system for measurement light together with the movable mirror and the first fixed mirror
Data Source
AI summary
An optical module includes a base which has a main surface and in which a mounting region and a driving region for moving the mounting region along a first direction parallel to the main surface are provided, a movable mirror which has a mirror surface having a positional relationship of intersecting the main surface and is mounted in the mounting region, a first fixed mirror which has a mirror surface having a positional relationship of intersecting the main surface and of which a position with respect to the base is fixed, and a beam splitter unit which constitutes a first interference optical system for measurement light together with the movable mirror and the first fixed mirror. The mirror surface of the movable mirror and the mirror surface of the first fixed mirror are directed to one side in the first direction.